Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor

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Abstract

An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is presented. The aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics play an important factor in determining the efficiency of the magnetic field coupling between two separated coils of MEMS planar magnetic sensors. The output voltage response of the fabricated coupled coil was measured in the frequency range from 10 kHz up to 10 MHz using LeCroy oscilloscope at four-terminal probe station, while the resistance characteristics of the coil were measured using Agilent LCR meter for a various thicknesses of the coil structure. The measured device was fabricated using an optimized surface micromachining process. A maximum voltage gain of −0.72 dB was obtained for coil with 1.4 µm thick metal operating at 3 MHz. The results showed that there is significant dependency of coil structure, operating frequency and material parameter on the gain of the energy transferred from the excitation coil to the sensing coil which affects the sensitivity of the sensor.

Original languageEnglish
Pages (from-to)809-814
Number of pages6
JournalMicrosystem Technologies
Volume21
Issue number4
DOIs
Publication statusPublished - 2015

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Magnetic sensors
inductors
microelectromechanical systems
MEMS
coils
sensors
Electric potential
electric potential
Surface micromachining
Metals
Magnetic fields
oscilloscopes
micromachining
Sensors
stations
frequency ranges
energy
probes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

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title = "Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor",
abstract = "An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is presented. The aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics play an important factor in determining the efficiency of the magnetic field coupling between two separated coils of MEMS planar magnetic sensors. The output voltage response of the fabricated coupled coil was measured in the frequency range from 10 kHz up to 10 MHz using LeCroy oscilloscope at four-terminal probe station, while the resistance characteristics of the coil were measured using Agilent LCR meter for a various thicknesses of the coil structure. The measured device was fabricated using an optimized surface micromachining process. A maximum voltage gain of −0.72 dB was obtained for coil with 1.4 µm thick metal operating at 3 MHz. The results showed that there is significant dependency of coil structure, operating frequency and material parameter on the gain of the energy transferred from the excitation coil to the sensing coil which affects the sensitivity of the sensor.",
author = "Jumril Yunas and {Yeop Majlis}, Burhanuddin and Hamzah, {Azrul Azlan} and Badariah Bais and N. Sulaiman",
year = "2015",
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journal = "Microsystem Technologies",
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T1 - Voltage transfer analysis of sandwich coupled inductors for MEMS planar magnetic sensor

AU - Yunas, Jumril

AU - Yeop Majlis, Burhanuddin

AU - Hamzah, Azrul Azlan

AU - Bais, Badariah

AU - Sulaiman, N.

PY - 2015

Y1 - 2015

N2 - An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is presented. The aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics play an important factor in determining the efficiency of the magnetic field coupling between two separated coils of MEMS planar magnetic sensors. The output voltage response of the fabricated coupled coil was measured in the frequency range from 10 kHz up to 10 MHz using LeCroy oscilloscope at four-terminal probe station, while the resistance characteristics of the coil were measured using Agilent LCR meter for a various thicknesses of the coil structure. The measured device was fabricated using an optimized surface micromachining process. A maximum voltage gain of −0.72 dB was obtained for coil with 1.4 µm thick metal operating at 3 MHz. The results showed that there is significant dependency of coil structure, operating frequency and material parameter on the gain of the energy transferred from the excitation coil to the sensing coil which affects the sensitivity of the sensor.

AB - An analysis on voltage transfer characteristic of magnetically coupled sandwich inductor is presented. The aim of the study is to determine the effects of induced voltage characteristics on the gain of the transferred magnetic energy at various coil thicknesses. The induced voltage characteristics play an important factor in determining the efficiency of the magnetic field coupling between two separated coils of MEMS planar magnetic sensors. The output voltage response of the fabricated coupled coil was measured in the frequency range from 10 kHz up to 10 MHz using LeCroy oscilloscope at four-terminal probe station, while the resistance characteristics of the coil were measured using Agilent LCR meter for a various thicknesses of the coil structure. The measured device was fabricated using an optimized surface micromachining process. A maximum voltage gain of −0.72 dB was obtained for coil with 1.4 µm thick metal operating at 3 MHz. The results showed that there is significant dependency of coil structure, operating frequency and material parameter on the gain of the energy transferred from the excitation coil to the sensing coil which affects the sensitivity of the sensor.

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