Three-dimensional finite element method simulation of perforated graphene nano-electro-mechanical (NEM) switches

Mohd Amir Zulkefli, Mohd Ambri Mohamed, Kim Shyong Siow, Burhanuddin Yeop Majlis, Jothiramalingam Kulothungan, Manoharan Muruganathan, Hiroshi Mizuta

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

The miniaturization trend leads to the development of a graphene based nanoelectromechanical (NEM) switch to fulfill the high demand in low power device applications. In this article, we highlight the finite element (FEM) simulation of the graphene-based NEM switches of fixed-fixed ends design with beam structures which are perforated and intact. Pull-in and pull-out characteristics are analyzed by using the FEM approach provided by IntelliSuite software, version 8.8.5.1. The FEM results are consistent with the published experimental data. This analysis shows the possibility of achieving a low pull-in voltage that is below 2 V for a ratio below 15:0.03:0.7 value for the graphene beam length, thickness, and air gap thickness, respectively. The introduction of perforation in the graphene beam-based NEM switch further achieved the pull-in voltage as low as 1.5 V for a 250 nm hole length, 100 nm distance between each hole, and 12-number of hole column. Then, a von Mises stress analysis is conducted to investigate the mechanical stability of the intact and perforated graphene-based NEM switch. This analysis shows that a longer and thinner graphene beam reduced the von Mises stress. The introduction of perforation concept further reduced the von Mises stress at the graphene beam end and the beam center by approximately ~20–35% and ~10–20%, respectively. These theoretical results, performed by FEM simulation, are expected to expedite improvements in the working parameter and dimension for low voltage and better mechanical stability operation of graphene-based NEM switch device fabrication.

Original languageEnglish
Article number236
JournalMicromachines
Volume8
Issue number8
DOIs
Publication statusPublished - 31 Jul 2017

Fingerprint

Graphene
Switches
Finite element method
Mechanical stability
Electric potential
Stress analysis
Fabrication
Air

Keywords

  • Finite element simulation (FEM)
  • Graphene
  • Intact beam structure
  • Nanoelectromechanical (NEM) switch
  • Perforated beam structure
  • Pull-in voltage characteristic
  • Von Mises stress

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Three-dimensional finite element method simulation of perforated graphene nano-electro-mechanical (NEM) switches. / Zulkefli, Mohd Amir; Mohamed, Mohd Ambri; Siow, Kim Shyong; Yeop Majlis, Burhanuddin; Kulothungan, Jothiramalingam; Muruganathan, Manoharan; Mizuta, Hiroshi.

In: Micromachines, Vol. 8, No. 8, 236, 31.07.2017.

Research output: Contribution to journalArticle

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