Thick-film deposition of high-viscous liquid photopolymer

Jafar Alvankarian, Mitra Damghanian, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

There are high interests among the researchers and industries for effective deposition of thick layer liquid photo-resists with applications such as fabrication of microfluidics and polymeric membranes using lithography. In this paper, we study performance of different techniques of coating for thick layers of SU-8 using spin coating, self planarization and a technique of sandwiching the resin between two parallel solid plates. Deposition using spin coaters for SU-8 2075 is limited hardly to around 250 μm with some irregularities such as edge-beads. Selfplanarization requires enough resting time. We have achieved a thickness of around 1 mm in a single coating but is limited to only thick layers in reasonable time. The sandwich technique can be used for any thickness and is very fast. We present here a comparison of the three mentioned methods according to our observed data of the coating time, uniformity of the coating surface and capability of coating thick layers for a high viscosity SU-8 2075 that is employed in fabrication of microfluidics micro-structures.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages5-8
Number of pages4
Volume254
DOIs
Publication statusPublished - 2011
EventInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS - Suntec
Duration: 26 Jun 20111 Jul 2011

Publication series

NameAdvanced Materials Research
Volume254
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS
CitySuntec
Period26/6/111/7/11

Fingerprint

Photopolymers
Thick films
Coatings
Liquids
Microfluidics
Fabrication
Polymeric membranes
Spin coating
Lithography
Resins
Viscosity
Microstructure
Industry

Keywords

  • Deposition
  • High-Viscous
  • Sandwiching
  • SU-8
  • Thick-film

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Alvankarian, J., Damghanian, M., & Yeop Majlis, B. (2011). Thick-film deposition of high-viscous liquid photopolymer. In Advanced Materials Research (Vol. 254, pp. 5-8). (Advanced Materials Research; Vol. 254). https://doi.org/10.4028/www.scientific.net/AMR.254.5

Thick-film deposition of high-viscous liquid photopolymer. / Alvankarian, Jafar; Damghanian, Mitra; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 254 2011. p. 5-8 (Advanced Materials Research; Vol. 254).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Alvankarian, J, Damghanian, M & Yeop Majlis, B 2011, Thick-film deposition of high-viscous liquid photopolymer. in Advanced Materials Research. vol. 254, Advanced Materials Research, vol. 254, pp. 5-8, International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS, Suntec, 26/6/11. https://doi.org/10.4028/www.scientific.net/AMR.254.5
Alvankarian J, Damghanian M, Yeop Majlis B. Thick-film deposition of high-viscous liquid photopolymer. In Advanced Materials Research. Vol. 254. 2011. p. 5-8. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.254.5
Alvankarian, Jafar ; Damghanian, Mitra ; Yeop Majlis, Burhanuddin. / Thick-film deposition of high-viscous liquid photopolymer. Advanced Materials Research. Vol. 254 2011. pp. 5-8 (Advanced Materials Research).
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