Theoretical analysis of thin film oxide as insulator of planar micro-coils

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, a theoretical analysis of thin film oxide resulted from lumped element model analysis using ASITIC simulation tool is presented. The study is aimed to investigate the effect of the oxide thickness on the electrical characteristics of planar micro-coils. Some important device parameters, such as parasitic capacitances and resistances caused by oxide and substrate layer, and quality factor of the planar coil, as well as the characteristic of the magnetic field coupled between the coils are analyzed in wide range of operating frequency. The simulation results show that there is significant influence of the oxide thickness to the device characteristics. It is shown that by increasing the thickness of the oxide layer on the substrate, a high Q-factor of 5 can be obtained, while the magnetic coupling is improved when the thickness of the oxide layer residing between metal layers is reduced.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages2462-2466
Number of pages5
Volume194-196
DOIs
Publication statusPublished - 2011
Event2nd International Conference on Manufacturing Science and Engineering, ICMSE 2011 - Guilin
Duration: 9 Apr 201111 Apr 2011

Publication series

NameAdvanced Materials Research
Volume194-196
ISSN (Print)10226680

Other

Other2nd International Conference on Manufacturing Science and Engineering, ICMSE 2011
CityGuilin
Period9/4/1111/4/11

Fingerprint

Thin films
Oxides
Magnetic couplings
Substrates
Capacitance
Magnetic fields
Metals

Keywords

  • Electrical characteristic
  • Lumped element model
  • Planar micro-coil
  • Silicon dioxide (SiO)
  • Thin film

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Yunas, J., Hamzah, A. A., & Yeop Majlis, B. (2011). Theoretical analysis of thin film oxide as insulator of planar micro-coils. In Advanced Materials Research (Vol. 194-196, pp. 2462-2466). (Advanced Materials Research; Vol. 194-196). https://doi.org/10.4028/www.scientific.net/AMR.194-196.2462

Theoretical analysis of thin film oxide as insulator of planar micro-coils. / Yunas, Jumril; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 194-196 2011. p. 2462-2466 (Advanced Materials Research; Vol. 194-196).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yunas, J, Hamzah, AA & Yeop Majlis, B 2011, Theoretical analysis of thin film oxide as insulator of planar micro-coils. in Advanced Materials Research. vol. 194-196, Advanced Materials Research, vol. 194-196, pp. 2462-2466, 2nd International Conference on Manufacturing Science and Engineering, ICMSE 2011, Guilin, 9/4/11. https://doi.org/10.4028/www.scientific.net/AMR.194-196.2462
Yunas, Jumril ; Hamzah, Azrul Azlan ; Yeop Majlis, Burhanuddin. / Theoretical analysis of thin film oxide as insulator of planar micro-coils. Advanced Materials Research. Vol. 194-196 2011. pp. 2462-2466 (Advanced Materials Research).
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