Theoretical analysis of stiffness constant and effective mass for a round-folded beam in MEMS accelerometer

Wai Chi Wong, Ishak Abdul Azid, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

In this paper, the governing equations of stiffness constant and effective mass for a round folded suspension beam in Micro-Electro Mechanical System (MEMS) accelerometer are derived and solved. The stiffness constant is determined by the strain energy and Castigliano's displacement theorem, whereas the effective mass is determined by the Rayleigh principle. The stiffness constant and the effective mass are solved separately by components and then combined by using the superposition method. The results obtained by the derived equations agree well when compared with the finite element results for several thickness values. The governing equations derived in this paper can be used to predict the natural frequencies and sensitivity of the MEMS-accelerometer.

Original languageEnglish
Pages (from-to)517-525
Number of pages9
JournalStrojniski Vestnik/Journal of Mechanical Engineering
Volume57
Issue number6
DOIs
Publication statusPublished - 2011

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Accelerometers
Stiffness
Strain energy
Natural frequencies

Keywords

  • Effective mass
  • Folded beam
  • MEMS-accelerometer
  • Stiffness constant
  • Strain energy

ASJC Scopus subject areas

  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Theoretical analysis of stiffness constant and effective mass for a round-folded beam in MEMS accelerometer. / Wong, Wai Chi; Azid, Ishak Abdul; Yeop Majlis, Burhanuddin.

In: Strojniski Vestnik/Journal of Mechanical Engineering, Vol. 57, No. 6, 2011, p. 517-525.

Research output: Contribution to journalArticle

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