The study of the good polishing method for polymer SU-8 waveguide

Mohd Syuhaimi Ab Rahman, Fazlinda Ab-Aziz, Noor Azie Azura Mohd Arif, Mohd Saiful Dzulkefly Zan, Seri Mastura Mustaza, Abang Annuar Ehsan, Sahbudin Shaari

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This research focused on polish characteristic of polymer based waveguides. The aim of the research was to show how polishing parameters affect the cut length of the end surface of SU-8 polymer on silicon and to detemine the best parameters for polishing SU-8 polymer. Then, four samples were used for characterizing the polishing of polymer. Each sample was polished with the same rotation and sandpaper size but with different rotational speed. The experiment result shows that the best rotational speed for polishing polymer SU-8 sample on silicon is 200 rpm.

Original languageEnglish
Pages (from-to)459-465
Number of pages7
JournalOptica Applicata
Volume39
Issue number3
Publication statusPublished - 2009

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Polishing
polishing
Polymers
Waveguides
waveguides
polymers
Silicon
Industrial Oils
silicon
Experiments

Keywords

  • Cut off length
  • Rotational speed
  • Sandpaper
  • Silicon
  • SU-8 polymer
  • Waveguides polishing

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

The study of the good polishing method for polymer SU-8 waveguide. / Ab Rahman, Mohd Syuhaimi; Ab-Aziz, Fazlinda; Mohd Arif, Noor Azie Azura; Zan, Mohd Saiful Dzulkefly; Mustaza, Seri Mastura; Ehsan, Abang Annuar; Shaari, Sahbudin.

In: Optica Applicata, Vol. 39, No. 3, 2009, p. 459-465.

Research output: Contribution to journalArticle

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