### Abstract

The harmonic modes of movable proof-mass of differential capacitive accelerometer plays an important role in design. Another modes except main mode must he minimized to avoid uncertainty value of capacitance. In this paper, we tried to optimize the differential capacitive .accelerometer using the variation of the length of fmger attached at the proof mass. The length of fmger varies from 40 μm to 240 μm with the variation of the width of proof-mass from 10 μm to 40 μm. The results have shown that the need to choose the length of finger for minimizing the effect of harmonic modes is as greater than 140 μm assuming the external forces distributed in the interval of 0 to 1 MHZ.

Original language | English |
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Title of host publication | IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE |

Pages | 529-533 |

Number of pages | 5 |

Publication status | Published - 2002 |

Event | 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002 - Penang Duration: 19 Dec 2002 → 21 Dec 2002 |

### Other

Other | 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002 |
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City | Penang |

Period | 19/12/02 → 21/12/02 |

### Fingerprint

### ASJC Scopus subject areas

- Electrical and Electronic Engineering
- Electronic, Optical and Magnetic Materials

### Cite this

*IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE*(pp. 529-533). [1217879]

**The optimization of mechanical harmonic modes of the 75g balanced weight distribution capacitive accelerometer.** / Tamsir, Agus Santoso; Saharil, Farizah; Yeop Majlis, Burhanuddin.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

*IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE.*, 1217879, pp. 529-533, 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002, Penang, 19/12/02.

}

TY - GEN

T1 - The optimization of mechanical harmonic modes of the 75g balanced weight distribution capacitive accelerometer

AU - Tamsir, Agus Santoso

AU - Saharil, Farizah

AU - Yeop Majlis, Burhanuddin

PY - 2002

Y1 - 2002

N2 - The harmonic modes of movable proof-mass of differential capacitive accelerometer plays an important role in design. Another modes except main mode must he minimized to avoid uncertainty value of capacitance. In this paper, we tried to optimize the differential capacitive .accelerometer using the variation of the length of fmger attached at the proof mass. The length of fmger varies from 40 μm to 240 μm with the variation of the width of proof-mass from 10 μm to 40 μm. The results have shown that the need to choose the length of finger for minimizing the effect of harmonic modes is as greater than 140 μm assuming the external forces distributed in the interval of 0 to 1 MHZ.

AB - The harmonic modes of movable proof-mass of differential capacitive accelerometer plays an important role in design. Another modes except main mode must he minimized to avoid uncertainty value of capacitance. In this paper, we tried to optimize the differential capacitive .accelerometer using the variation of the length of fmger attached at the proof mass. The length of fmger varies from 40 μm to 240 μm with the variation of the width of proof-mass from 10 μm to 40 μm. The results have shown that the need to choose the length of finger for minimizing the effect of harmonic modes is as greater than 140 μm assuming the external forces distributed in the interval of 0 to 1 MHZ.

UR - http://www.scopus.com/inward/record.url?scp=34547688081&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34547688081&partnerID=8YFLogxK

M3 - Conference contribution

SN - 0780375785

SN - 9780780375789

SP - 529

EP - 533

BT - IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE

ER -