The optimization of mechanical harmonic modes of the 75g balanced weight distribution capacitive accelerometer

Agus Santoso Tamsir, Farizah Saharil, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The harmonic modes of movable proof-mass of differential capacitive accelerometer plays an important role in design. Another modes except main mode must he minimized to avoid uncertainty value of capacitance. In this paper, we tried to optimize the differential capacitive .accelerometer using the variation of the length of fmger attached at the proof mass. The length of fmger varies from 40 μm to 240 μm with the variation of the width of proof-mass from 10 μm to 40 μm. The results have shown that the need to choose the length of finger for minimizing the effect of harmonic modes is as greater than 140 μm assuming the external forces distributed in the interval of 0 to 1 MHZ.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages529-533
Number of pages5
Publication statusPublished - 2002
Event2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002 - Penang
Duration: 19 Dec 200221 Dec 2002

Other

Other2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002
CityPenang
Period19/12/0221/12/02

Fingerprint

Accelerometers
Capacitance
Uncertainty

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Tamsir, A. S., Saharil, F., & Yeop Majlis, B. (2002). The optimization of mechanical harmonic modes of the 75g balanced weight distribution capacitive accelerometer. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 529-533). [1217879]

The optimization of mechanical harmonic modes of the 75g balanced weight distribution capacitive accelerometer. / Tamsir, Agus Santoso; Saharil, Farizah; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 529-533 1217879.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Tamsir, AS, Saharil, F & Yeop Majlis, B 2002, The optimization of mechanical harmonic modes of the 75g balanced weight distribution capacitive accelerometer. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 1217879, pp. 529-533, 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002, Penang, 19/12/02.
Tamsir AS, Saharil F, Yeop Majlis B. The optimization of mechanical harmonic modes of the 75g balanced weight distribution capacitive accelerometer. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 529-533. 1217879
Tamsir, Agus Santoso ; Saharil, Farizah ; Yeop Majlis, Burhanuddin. / The optimization of mechanical harmonic modes of the 75g balanced weight distribution capacitive accelerometer. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. pp. 529-533
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