The electrical and mechanical characterization of silicon based electromagnetic micro-actuator for fluid injection system

Jumril Yunas, Roer E. Pawinanto, N. U.R. Indah, Sagir Alva, Darwin Sebayang

Research output: Contribution to journalArticle

Abstract

Electrical and mechanical properties of Electromagnetic (EM) micro-actuator with silicon membrane has been characterized. The study is aimed to see the effect of the geometry and the structure of the actuator system on the actuating performance of the silicon-based membrane for fluid injection purposes. The actuator system consists of two main parts, namely, the electromagnetic part that generates an electromagnetic field and the magneto-mechanical part that enable the membrane deformation depending on the magnetic force on the silicon membrane. A standard MEMS process was implemented to fabricate the actuator system with an additional bonding between the actuator part and microfluidic part to complete the system for fluid injection purpose. The simulation using COMSOL Multiphysics was done to see the generation of the magnetic force and to see its effect on the membrane deformation. It was found that the height of the generated magnetic force increases significantly with the applied power. The measurement of the membrane deformation done at a 20-µm silicon membrane showed a maximum deflection of 4.6 µm. The measurement results of the electrical characteristic of the device were compared with the simulation to validate the analysis. This study is very important to get the general insight of the silicon-based actuator membrane capability for the fluidic injection system in lab-on-chip.

Original languageEnglish
Pages (from-to)2606-2615
Number of pages10
JournalJournal of Engineering Science and Technology
Volume13
Issue number8
Publication statusPublished - 1 Aug 2018

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Actuators
Membranes
Silicon
Fluids
Fluidics
Microfluidics
Electromagnetic fields
MEMS
Electric properties
Mechanical properties
Geometry

Keywords

  • Electromagnetic micro-actuator
  • Fluid injection system
  • Pilicon membrane
  • Planar micro-coil

ASJC Scopus subject areas

  • Engineering(all)

Cite this

The electrical and mechanical characterization of silicon based electromagnetic micro-actuator for fluid injection system. / Yunas, Jumril; Pawinanto, Roer E.; Indah, N. U.R.; Alva, Sagir; Sebayang, Darwin.

In: Journal of Engineering Science and Technology, Vol. 13, No. 8, 01.08.2018, p. 2606-2615.

Research output: Contribution to journalArticle

Yunas, Jumril ; Pawinanto, Roer E. ; Indah, N. U.R. ; Alva, Sagir ; Sebayang, Darwin. / The electrical and mechanical characterization of silicon based electromagnetic micro-actuator for fluid injection system. In: Journal of Engineering Science and Technology. 2018 ; Vol. 13, No. 8. pp. 2606-2615.
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