The effects of deposition pressure on the optical and structural properties of d.c. PECVD hydrogenated amorphous carbon films

Rozidawati Awang, Goh Boon Tong, Siti Meriam Ab Gani, Richard Ritikos, Saadah A. Rahman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A direct-current plasma enhanced chemical vapour deposition (PECVD) system was designed and built in-house for the deposition of hydrogenated amorphous carbon(a-C:H) thin films. In this work, a-C:H thin films prepared using this system at different deposition pressures were studied. The influence of deposition pressure on the deposition rate, energy gap, bonded hydrogen content and structure of the film has been investigated. The characterization techniques were determined from optical transmission spectroscopy, Fourier transform infrared spectroscopy and X-ray diffraction measurements. The results demonstrated that the deposition pressure had strong influence on the deposition rate, optical energy gap and the bonded H content in the film. Evidence of crystallinity was observed in films prepared at low deposition pressure.

Original languageEnglish
Title of host publicationMaterials Science Forum
Pages81-84
Number of pages4
Volume517
DOIs
Publication statusPublished - 2006
Externally publishedYes
EventInternational Conference on Functional Materials and Devices, ICFMD-2005 - Kuala Lumpur
Duration: 6 Jun 20058 Jun 2005

Publication series

NameMaterials Science Forum
Volume517
ISSN (Print)02555476

Other

OtherInternational Conference on Functional Materials and Devices, ICFMD-2005
CityKuala Lumpur
Period6/6/058/6/05

Fingerprint

Carbon films
Amorphous carbon
Amorphous films
Plasma enhanced chemical vapor deposition
Structural properties
Optical properties
Deposition rates
Energy gap
Thin films
Light transmission
Fourier transform infrared spectroscopy
Hydrogen
Spectroscopy
X ray diffraction

Keywords

  • Hydrogenated amorphous carbon
  • Infrared spectroscopy
  • Optical properties
  • Plasma deposition
  • Structural properties

ASJC Scopus subject areas

  • Materials Science(all)

Cite this

Awang, R., Tong, G. B., Gani, S. M. A., Ritikos, R., & Rahman, S. A. (2006). The effects of deposition pressure on the optical and structural properties of d.c. PECVD hydrogenated amorphous carbon films. In Materials Science Forum (Vol. 517, pp. 81-84). (Materials Science Forum; Vol. 517). https://doi.org/10.4028/0-87849-404-9.81

The effects of deposition pressure on the optical and structural properties of d.c. PECVD hydrogenated amorphous carbon films. / Awang, Rozidawati; Tong, Goh Boon; Gani, Siti Meriam Ab; Ritikos, Richard; Rahman, Saadah A.

Materials Science Forum. Vol. 517 2006. p. 81-84 (Materials Science Forum; Vol. 517).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Awang, R, Tong, GB, Gani, SMA, Ritikos, R & Rahman, SA 2006, The effects of deposition pressure on the optical and structural properties of d.c. PECVD hydrogenated amorphous carbon films. in Materials Science Forum. vol. 517, Materials Science Forum, vol. 517, pp. 81-84, International Conference on Functional Materials and Devices, ICFMD-2005, Kuala Lumpur, 6/6/05. https://doi.org/10.4028/0-87849-404-9.81
Awang R, Tong GB, Gani SMA, Ritikos R, Rahman SA. The effects of deposition pressure on the optical and structural properties of d.c. PECVD hydrogenated amorphous carbon films. In Materials Science Forum. Vol. 517. 2006. p. 81-84. (Materials Science Forum). https://doi.org/10.4028/0-87849-404-9.81
Awang, Rozidawati ; Tong, Goh Boon ; Gani, Siti Meriam Ab ; Ritikos, Richard ; Rahman, Saadah A. / The effects of deposition pressure on the optical and structural properties of d.c. PECVD hydrogenated amorphous carbon films. Materials Science Forum. Vol. 517 2006. pp. 81-84 (Materials Science Forum).
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