The effect of dopants on the sensing selectivity of SnO 2 thin films-based gas sensors

Shafariza Shamsudin, Muhammad Yahaya, Muhamad Mat Salleh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The development of metal oxide gas sensor devices with optimized selectivity and sensitivity has been gaining prominence in recent years. This paper reports the influence of doping to optimize the selectivity of the SnO 2 thin films doped with Pt, Fd, CuO, ZnO and TiO 2 toward the variety of vapor gases such as cyclohexane, chloroform, benzene and acetone. The films were prepared by using electron beam evaporation. The sensing selectivity was based on the electrical change of the films when being exposed to vapor gases. Each film shows a different response toward different vapor gases. The selectivity of these films was observed to be depended markedly on the doping materials.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages455-457
Number of pages3
Publication statusPublished - 2002
Event2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002 - Penang
Duration: 19 Dec 200221 Dec 2002

Other

Other2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002
CityPenang
Period19/12/0221/12/02

Fingerprint

Chemical sensors
Doping (additives)
Thin films
Gases
Vapors
Cyclohexane
Chloroform
Chlorine compounds
Acetone
Benzene
Oxides
Electron beams
Evaporation
Metals

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Shamsudin, S., Yahaya, M., & Mat Salleh, M. (2002). The effect of dopants on the sensing selectivity of SnO 2 thin films-based gas sensors. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 455-457). [1217864]

The effect of dopants on the sensing selectivity of SnO 2 thin films-based gas sensors. / Shamsudin, Shafariza; Yahaya, Muhammad; Mat Salleh, Muhamad.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 455-457 1217864.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Shamsudin, S, Yahaya, M & Mat Salleh, M 2002, The effect of dopants on the sensing selectivity of SnO 2 thin films-based gas sensors. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 1217864, pp. 455-457, 2002 5th IEEE International Conference on Semiconductor Electronics, ICSE 2002, Penang, 19/12/02.
Shamsudin S, Yahaya M, Mat Salleh M. The effect of dopants on the sensing selectivity of SnO 2 thin films-based gas sensors. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. p. 455-457. 1217864
Shamsudin, Shafariza ; Yahaya, Muhammad ; Mat Salleh, Muhamad. / The effect of dopants on the sensing selectivity of SnO 2 thin films-based gas sensors. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2002. pp. 455-457
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