The effect of design parameters on static and dynamic behaviors of the MEMS microphone

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

Abstract This paper describes the effect of design parameters of MEMS capacitive microphone on the static and dynamic behaviors. The aim is to develop the microphones with high sensitivity and flat frequency response. The high sensitivity can be obtained by changing the initial stress of diaphragm, σ, diaphragm size, a, diaphragm thickness, t, back plate thickness, h, air gap thickness, d, back plate hole radius, r, surface area fraction occupied by the holes, a., and bias voltage. The equivalent electrical circuit method has been used to predict the structure behaviors and the microphone performance. The optimized structure has a diaphragm thickness of 0.8 um, a diaphragm area of 2.43 mm2 , an air gap of 4.0 μn and a 1.0 μn thick back plate with acoustical ports. The device shows maximum sensitivity of 47.9 mV/Pa, with a high frequency response extending to 18 kHz.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
Pages35-40
Number of pages6
DOIs
Publication statusPublished - 2006
Event2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006 - Kuala Lumpur
Duration: 29 Nov 20061 Dec 2006

Other

Other2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006
CityKuala Lumpur
Period29/11/061/12/06

Fingerprint

Microphones
Diaphragms
MEMS
Frequency response
Bias voltage
Air
Networks (circuits)

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Ganji, B. A., & Yeop Majlis, B. (2006). The effect of design parameters on static and dynamic behaviors of the MEMS microphone. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 35-40). [4266565] https://doi.org/10.1109/SMELEC.2006.381015

The effect of design parameters on static and dynamic behaviors of the MEMS microphone. / Ganji, Bahram Azizollah; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 35-40 4266565.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ganji, BA & Yeop Majlis, B 2006, The effect of design parameters on static and dynamic behaviors of the MEMS microphone. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 4266565, pp. 35-40, 2006 IEEE International Conference on Semiconductor Electronics, ICSE 2006, Kuala Lumpur, 29/11/06. https://doi.org/10.1109/SMELEC.2006.381015
Ganji BA, Yeop Majlis B. The effect of design parameters on static and dynamic behaviors of the MEMS microphone. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. p. 35-40. 4266565 https://doi.org/10.1109/SMELEC.2006.381015
Ganji, Bahram Azizollah ; Yeop Majlis, Burhanuddin. / The effect of design parameters on static and dynamic behaviors of the MEMS microphone. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. 2006. pp. 35-40
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