The capacitance and temperature effects of the SiC- and Si-based MEMS pressure sensor

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This project develops the pressure sensor for monitoring the extreme conditions inside the gas turbine engine. The capacitive-based instead of piezoresistive-based pressure sensor is employed to avoid temperature drift. The deflecting (top) plate and the fixed (bottom) plate generate the capacitance, which is proportional to the applied input pressure and temperature. Two thin film materials of four different sizes are employed for the top plate, namely cubic silicon carbide (3C-SiC) and silicon (Si). Their performances in term of the sensitivity and linearity of the capacitance versus pressure are simulated at the temperature of 27°C, 500°C, 700°C and 1000°C. The results show that both materials display linear characteristics for temperature up to 500°C, although SiC-based sensor shows higher sensitivity. However, when the temperatures are increased to 700°C and 1000°C, the Si- based pressure sensor starts to malfunction at 50 MPa. However, the SiC-based pressure sensor continues to demonstrate high sensitivity and linearity at such high temperature and pressure. This paper validates the need of employing silicon carbide instead of silicon for sensing of extreme environments.

Original languageEnglish
Article number012022
JournalJournal of Physics: Conference Series
Volume431
Issue number1
DOIs
Publication statusPublished - 2013

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pressure sensors
microelectromechanical systems
temperature effects
capacitance
silicon
silicon carbides
linearity
sensitivity
temperature
gas turbine engines
malfunctions
sensors
thin films

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

The capacitance and temperature effects of the SiC- and Si-based MEMS pressure sensor. / Marsi, N.; Yeop Majlis, Burhanuddin; Mohd-Yasin, F.; Hamzah, Azrul Azlan.

In: Journal of Physics: Conference Series, Vol. 431, No. 1, 012022, 2013.

Research output: Contribution to journalArticle

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