Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace

Kong Eng Ng, Teck Yaw Tiong, Mohd Ambri Mohamed, Wei Sea Chang, Chang Fu Dee, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this research., a 1064 nm Nd:YAG laser with pulse duration of 8 ns was used to fire ZnO pellet in a furnace using 6 different energy densities. A substrate was placed above the ZnO target which was positioning at an angle of 45° within the frame of the target holder. ZnO nanoflakes were formed on the surface of ceramic., Al2O3substrate was placed upside down on a substrate holder. This simple modification on the substrate orientation has greatly reduced the deposition of useless debris on the substrate. High crystalline ZnO nanoflakes with diameter ranging from 30 to 100 nm were characterized by Field Emission Scanning Electron Microscope (FESEM). Three sharp peaks (100)., (002) and (101) characterized by X-Ray Diffraction (XRD) confirm the deposition of ZnO nanoflakes on the Al2O3substrate. The depositions were remarkable as it required only low tube-furnace vacuum of 3.9 Torr (5.2 mbar) without extra thermal source other than the heat generated by the laser itself.

Original languageEnglish
Title of host publication2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages140-143
Number of pages4
Volume2018-August
ISBN (Electronic)9781538652831
DOIs
Publication statusPublished - 3 Oct 2018
Event13th IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Kuala Lumpur, Malaysia
Duration: 15 Aug 201817 Aug 2018

Other

Other13th IEEE International Conference on Semiconductor Electronics, ICSE 2018
CountryMalaysia
CityKuala Lumpur
Period15/8/1817/8/18

Fingerprint

Pulsed laser deposition
Furnaces
Substrates
Vacuum furnaces
Lasers
Debris
Field emission
Laser pulses
Fires
Electron microscopes
Crystalline materials
Scanning
X ray diffraction
Hot Temperature

Keywords

  • nanostructured materials
  • pulsed laser deposition
  • ZnO nanoflakes

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Ng, K. E., Tiong, T. Y., Mohamed, M. A., Chang, W. S., Dee, C. F., & Yeop Majlis, B. (2018). Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace. In 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings (Vol. 2018-August, pp. 140-143). [8481292] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2018.8481292

Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace. / Ng, Kong Eng; Tiong, Teck Yaw; Mohamed, Mohd Ambri; Chang, Wei Sea; Dee, Chang Fu; Yeop Majlis, Burhanuddin.

2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August Institute of Electrical and Electronics Engineers Inc., 2018. p. 140-143 8481292.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ng, KE, Tiong, TY, Mohamed, MA, Chang, WS, Dee, CF & Yeop Majlis, B 2018, Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace. in 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. vol. 2018-August, 8481292, Institute of Electrical and Electronics Engineers Inc., pp. 140-143, 13th IEEE International Conference on Semiconductor Electronics, ICSE 2018, Kuala Lumpur, Malaysia, 15/8/18. https://doi.org/10.1109/SMELEC.2018.8481292
Ng KE, Tiong TY, Mohamed MA, Chang WS, Dee CF, Yeop Majlis B. Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace. In 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August. Institute of Electrical and Electronics Engineers Inc. 2018. p. 140-143. 8481292 https://doi.org/10.1109/SMELEC.2018.8481292
Ng, Kong Eng ; Tiong, Teck Yaw ; Mohamed, Mohd Ambri ; Chang, Wei Sea ; Dee, Chang Fu ; Yeop Majlis, Burhanuddin. / Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace. 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings. Vol. 2018-August Institute of Electrical and Electronics Engineers Inc., 2018. pp. 140-143
@inproceedings{1332d61618654fc79a1a83df70c87a7d,
title = "Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace",
abstract = "In this research., a 1064 nm Nd:YAG laser with pulse duration of 8 ns was used to fire ZnO pellet in a furnace using 6 different energy densities. A substrate was placed above the ZnO target which was positioning at an angle of 45° within the frame of the target holder. ZnO nanoflakes were formed on the surface of ceramic., Al2O3substrate was placed upside down on a substrate holder. This simple modification on the substrate orientation has greatly reduced the deposition of useless debris on the substrate. High crystalline ZnO nanoflakes with diameter ranging from 30 to 100 nm were characterized by Field Emission Scanning Electron Microscope (FESEM). Three sharp peaks (100)., (002) and (101) characterized by X-Ray Diffraction (XRD) confirm the deposition of ZnO nanoflakes on the Al2O3substrate. The depositions were remarkable as it required only low tube-furnace vacuum of 3.9 Torr (5.2 mbar) without extra thermal source other than the heat generated by the laser itself.",
keywords = "nanostructured materials, pulsed laser deposition, ZnO nanoflakes",
author = "Ng, {Kong Eng} and Tiong, {Teck Yaw} and Mohamed, {Mohd Ambri} and Chang, {Wei Sea} and Dee, {Chang Fu} and {Yeop Majlis}, Burhanuddin",
year = "2018",
month = "10",
day = "3",
doi = "10.1109/SMELEC.2018.8481292",
language = "English",
volume = "2018-August",
pages = "140--143",
booktitle = "2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
address = "United States",

}

TY - GEN

T1 - Synthesis of ZnO nanoflakes by 1064 nm Nd:YAG pulsed laser deposition in a horizontal tube furnace

AU - Ng, Kong Eng

AU - Tiong, Teck Yaw

AU - Mohamed, Mohd Ambri

AU - Chang, Wei Sea

AU - Dee, Chang Fu

AU - Yeop Majlis, Burhanuddin

PY - 2018/10/3

Y1 - 2018/10/3

N2 - In this research., a 1064 nm Nd:YAG laser with pulse duration of 8 ns was used to fire ZnO pellet in a furnace using 6 different energy densities. A substrate was placed above the ZnO target which was positioning at an angle of 45° within the frame of the target holder. ZnO nanoflakes were formed on the surface of ceramic., Al2O3substrate was placed upside down on a substrate holder. This simple modification on the substrate orientation has greatly reduced the deposition of useless debris on the substrate. High crystalline ZnO nanoflakes with diameter ranging from 30 to 100 nm were characterized by Field Emission Scanning Electron Microscope (FESEM). Three sharp peaks (100)., (002) and (101) characterized by X-Ray Diffraction (XRD) confirm the deposition of ZnO nanoflakes on the Al2O3substrate. The depositions were remarkable as it required only low tube-furnace vacuum of 3.9 Torr (5.2 mbar) without extra thermal source other than the heat generated by the laser itself.

AB - In this research., a 1064 nm Nd:YAG laser with pulse duration of 8 ns was used to fire ZnO pellet in a furnace using 6 different energy densities. A substrate was placed above the ZnO target which was positioning at an angle of 45° within the frame of the target holder. ZnO nanoflakes were formed on the surface of ceramic., Al2O3substrate was placed upside down on a substrate holder. This simple modification on the substrate orientation has greatly reduced the deposition of useless debris on the substrate. High crystalline ZnO nanoflakes with diameter ranging from 30 to 100 nm were characterized by Field Emission Scanning Electron Microscope (FESEM). Three sharp peaks (100)., (002) and (101) characterized by X-Ray Diffraction (XRD) confirm the deposition of ZnO nanoflakes on the Al2O3substrate. The depositions were remarkable as it required only low tube-furnace vacuum of 3.9 Torr (5.2 mbar) without extra thermal source other than the heat generated by the laser itself.

KW - nanostructured materials

KW - pulsed laser deposition

KW - ZnO nanoflakes

UR - http://www.scopus.com/inward/record.url?scp=85056277675&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85056277675&partnerID=8YFLogxK

U2 - 10.1109/SMELEC.2018.8481292

DO - 10.1109/SMELEC.2018.8481292

M3 - Conference contribution

VL - 2018-August

SP - 140

EP - 143

BT - 2018 IEEE International Conference on Semiconductor Electronics, ICSE 2018 - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

ER -