Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Citations (Scopus)

Abstract

In this paper, variations of folded beam suspension design are analyzed and simulated in order to study its effect on the performance of an area-changed MEMS lateral capacitive accelerometer. The simulation was carried out using Coventorware2003. Mechanical issues like spring constants, stress distributions, cross-axis sensitivities and shock survivability are discussed.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages335-339
Number of pages5
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

Accelerometers
MEMS
Stress concentration

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Bais, B., & Yeop Majlis, B. (2004). Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 335-339). [1620900]

Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer. / Bais, Badariah; Yeop Majlis, Burhanuddin.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 335-339 1620900.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bais, B & Yeop Majlis, B 2004, Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620900, pp. 335-339, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Bais B, Yeop Majlis B. Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 335-339. 1620900
Bais, Badariah ; Yeop Majlis, Burhanuddin. / Suspension design analysis on the performance of MEMS area-changed lateral capacitive accelerometer. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 335-339
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