Surface morphology characterisation of Sn-doped ZnO films for antireflective coating

N. P. Ariyanto, Huda Abdullah, N. S A Ghani

Research output: Contribution to journalArticle

14 Citations (Scopus)

Abstract

Sn-doped ZnO (x=0.0, 0.05, 0.10 and 0.15) films as antireflective coating (ARC) were successfully synthesised by electron beam evaporation method. X-ray diffraction (XRD) analysis confirmed that the as deposited films were hexagonal crystal structure of ZnO which is deteriorated by Sn dopant addition. Investigation of surface roughness films by atomic force microscopy (AFM) showed an increasing surface roughness with increasing dopant concentration. A dopant concentration of 15 at.-% would result in films with 35 nm average roughness (Ra). Annealing at 550uC would drastically increase Ra value especially for heavy doped samples. For 10 and 15 at.-% dopants, the Ra values were 120 and 370 nm. Scanning electron microscopy (SEM) showed that aggregation of small particles occurred more in doped films than in undoped films.

Original languageEnglish
Pages (from-to)157-160
Number of pages4
JournalMaterials Research Innovations
Volume13
Issue number3
DOIs
Publication statusPublished - Sep 2009

Fingerprint

Surface morphology
coatings
Coatings
Doping (additives)
Surface roughness
surface roughness
X ray diffraction analysis
Electron beams
Atomic force microscopy
Evaporation
roughness
Agglomeration
Crystal structure
evaporation
atomic force microscopy
electron beams
Annealing
Scanning electron microscopy
scanning electron microscopy
crystal structure

Keywords

  • Electron beam evaporation
  • Sn-doped ZnO
  • Thin film

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Surface morphology characterisation of Sn-doped ZnO films for antireflective coating. / Ariyanto, N. P.; Abdullah, Huda; Ghani, N. S A.

In: Materials Research Innovations, Vol. 13, No. 3, 09.2009, p. 157-160.

Research output: Contribution to journalArticle

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