Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure

A. A S M Radzi, Mohd. Ambar Yarmo, M. Rusop, S. Abdullah

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Multilayer structure of porous silicon was fabricated using electrochemical etching method. Average thickness of multilayer structure was verified. Surface morphology from Atomic Force Microscopy (AFM) shows that surface roughness was decreased when higher etching time applied to the samples. Si 2p binding energies were corresponded to the composition of void within the silicon which prompted the formation of porous silicon nanostructure. Depth profiling technique from X-Ray photoelectron spectroscopy (XPS) was used for compositional determination of porous silicon layers since samples' porosity varied according to current density applied during the electrochemical etching process. Multilayer porous silicon is a high potential candidate for Bragg grating waveguide device.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages17-21
Number of pages5
Volume620
DOIs
Publication statusPublished - 2013
EventInternational Conference on X-Ray and related Technique in Research and Industry, ICXRI 2012 - Pulau Pinang
Duration: 3 Jul 20125 Jul 2012

Publication series

NameAdvanced Materials Research
Volume620
ISSN (Print)10226680

Other

OtherInternational Conference on X-Ray and related Technique in Research and Industry, ICXRI 2012
CityPulau Pinang
Period3/7/125/7/12

Fingerprint

Porous silicon
Binding energy
Surface morphology
Nanostructures
Multilayers
Electrochemical etching
Bragg gratings
Depth profiling
Etching
Atomic force microscopy
Waveguides
Current density
X ray photoelectron spectroscopy
Porosity
Surface roughness
Silicon
Chemical analysis

Keywords

  • Binding energy
  • Multilayer structure
  • Porous silicon

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Radzi, A. A. S. M., Yarmo, M. A., Rusop, M., & Abdullah, S. (2013). Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure. In Advanced Materials Research (Vol. 620, pp. 17-21). (Advanced Materials Research; Vol. 620). https://doi.org/10.4028/www.scientific.net/AMR.620.17

Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure. / Radzi, A. A S M; Yarmo, Mohd. Ambar; Rusop, M.; Abdullah, S.

Advanced Materials Research. Vol. 620 2013. p. 17-21 (Advanced Materials Research; Vol. 620).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Radzi, AASM, Yarmo, MA, Rusop, M & Abdullah, S 2013, Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure. in Advanced Materials Research. vol. 620, Advanced Materials Research, vol. 620, pp. 17-21, International Conference on X-Ray and related Technique in Research and Industry, ICXRI 2012, Pulau Pinang, 3/7/12. https://doi.org/10.4028/www.scientific.net/AMR.620.17
Radzi AASM, Yarmo MA, Rusop M, Abdullah S. Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure. In Advanced Materials Research. Vol. 620. 2013. p. 17-21. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.620.17
Radzi, A. A S M ; Yarmo, Mohd. Ambar ; Rusop, M. ; Abdullah, S. / Surface morphology and Si 2p binding energy investigation of multilayer porous silicon nanostructure. Advanced Materials Research. Vol. 620 2013. pp. 17-21 (Advanced Materials Research).
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