Surface micromachined on-chip transformer fabricated on glass substrate

Research output: Contribution to journalArticle

17 Citations (Scopus)

Abstract

On-chip micro-transformer on high resistive glass substrate has been developed. The transformer consists of stacked spiral coil with square interwinding coil structure which is fabricated using surface micromachining technique. The performance of the micro-transformer is illustrated through low and high frequency measurements. The characteristics of glass based transformer are compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer. The process fabrication of the device is simple, highlighting a good prospect for the future three-dimensional RF-MEMS device application.

Original languageEnglish
Pages (from-to)547-552
Number of pages6
JournalMicrosystem Technologies
Volume15
Issue number4
DOIs
Publication statusPublished - Apr 2009

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transformers
chips
Glass
glass
Substrates
Surface micromachining
Silicon
MEMS
coils
Fabrication
frequency measurement
micromachining
microelectromechanical systems
low frequencies
fabrication
silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

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abstract = "On-chip micro-transformer on high resistive glass substrate has been developed. The transformer consists of stacked spiral coil with square interwinding coil structure which is fabricated using surface micromachining technique. The performance of the micro-transformer is illustrated through low and high frequency measurements. The characteristics of glass based transformer are compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer. The process fabrication of the device is simple, highlighting a good prospect for the future three-dimensional RF-MEMS device application.",
author = "Jumril Yunas and Hamzah, {Azrul Azlan} and {Yeop Majlis}, Burhanuddin",
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AB - On-chip micro-transformer on high resistive glass substrate has been developed. The transformer consists of stacked spiral coil with square interwinding coil structure which is fabricated using surface micromachining technique. The performance of the micro-transformer is illustrated through low and high frequency measurements. The characteristics of glass based transformer are compared with conventional Si-based micro-transformer. The results show that the RF performance of the glass-based transformer is improved compared to that of silicon-based transformer. The process fabrication of the device is simple, highlighting a good prospect for the future three-dimensional RF-MEMS device application.

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