Surface characterisation of TiC x N 1 − x coatings processed by cathodic arc physical vapour deposition: XPS and XRD analysis

Ping Chuan Siow, Jaharah A Ghani, Muhammad Rizal, Talib Ria Jaafar, Mariyam Jameelah Ghazali, Che Hassan Che Haron

Research output: Contribution to journalArticle

Abstract

The properties of titanium carbonitride (TiCN) can be controlled by maintaining the C―N ratio within the coating to a certain level. An experimental study was carried out to vary the composition and properties of TiCN using cathodic arc physical vapour deposition (CAPVD). The substrate used was tungsten carbide (WC-6Co), which was prepared in-house through a powder metallurgy process. In order to form the TiC x N 1 − x coatings, titanium (Ti) was used as the cathode, while methane (CH 4 ) and nitrogen (N 2 ) gases were used as sources for C and N, respectively. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) were used to investigate the composition, chemical state, and bonding structure of the deposited coatings. The results show that the composition, intensity of elements, lattice parameter, and d-value of TiC x N 1 − x coatings were successfully varied by controlling the CH 4 fraction (CH 4 /N 2 ratio). With the increase in CH 4 fraction, the intensity of C and N within the TiC x N 1 − x coatings increased and decreased, respectively. Consequently, the C―Ti and C―N bonds were increased and N―Ti bonds were decreased.

Original languageEnglish
JournalSurface and Interface Analysis
DOIs
Publication statusPublished - 1 Jan 2019

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Physical vapor deposition
X ray diffraction analysis
X ray photoelectron spectroscopy
arcs
photoelectron spectroscopy
vapor deposition
coatings
Coatings
methylidyne
diffraction
Carbon nitride
titanium
Titanium
x rays
Chemical analysis
tungsten carbides
powder metallurgy
Tungsten carbide
Methane
Powder metallurgy

Keywords

  • cathodic arc physical vapour deposition (CAPVD)
  • TiC coating
  • TiCN coating
  • TiN coating
  • XPS
  • XRD

ASJC Scopus subject areas

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

Cite this

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title = "Surface characterisation of TiC x N 1 − x coatings processed by cathodic arc physical vapour deposition: XPS and XRD analysis",
abstract = "The properties of titanium carbonitride (TiCN) can be controlled by maintaining the C―N ratio within the coating to a certain level. An experimental study was carried out to vary the composition and properties of TiCN using cathodic arc physical vapour deposition (CAPVD). The substrate used was tungsten carbide (WC-6Co), which was prepared in-house through a powder metallurgy process. In order to form the TiC x N 1 − x coatings, titanium (Ti) was used as the cathode, while methane (CH 4 ) and nitrogen (N 2 ) gases were used as sources for C and N, respectively. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) were used to investigate the composition, chemical state, and bonding structure of the deposited coatings. The results show that the composition, intensity of elements, lattice parameter, and d-value of TiC x N 1 − x coatings were successfully varied by controlling the CH 4 fraction (CH 4 /N 2 ratio). With the increase in CH 4 fraction, the intensity of C and N within the TiC x N 1 − x coatings increased and decreased, respectively. Consequently, the C―Ti and C―N bonds were increased and N―Ti bonds were decreased.",
keywords = "cathodic arc physical vapour deposition (CAPVD), TiC coating, TiCN coating, TiN coating, XPS, XRD",
author = "Siow, {Ping Chuan} and {A Ghani}, Jaharah and Muhammad Rizal and Jaafar, {Talib Ria} and Ghazali, {Mariyam Jameelah} and {Che Haron}, {Che Hassan}",
year = "2019",
month = "1",
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doi = "10.1002/sia.6626",
language = "English",
journal = "Surface and Interface Analysis",
issn = "0142-2421",
publisher = "John Wiley and Sons Ltd",

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T1 - Surface characterisation of TiC x N 1 − x coatings processed by cathodic arc physical vapour deposition

T2 - XPS and XRD analysis

AU - Siow, Ping Chuan

AU - A Ghani, Jaharah

AU - Rizal, Muhammad

AU - Jaafar, Talib Ria

AU - Ghazali, Mariyam Jameelah

AU - Che Haron, Che Hassan

PY - 2019/1/1

Y1 - 2019/1/1

N2 - The properties of titanium carbonitride (TiCN) can be controlled by maintaining the C―N ratio within the coating to a certain level. An experimental study was carried out to vary the composition and properties of TiCN using cathodic arc physical vapour deposition (CAPVD). The substrate used was tungsten carbide (WC-6Co), which was prepared in-house through a powder metallurgy process. In order to form the TiC x N 1 − x coatings, titanium (Ti) was used as the cathode, while methane (CH 4 ) and nitrogen (N 2 ) gases were used as sources for C and N, respectively. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) were used to investigate the composition, chemical state, and bonding structure of the deposited coatings. The results show that the composition, intensity of elements, lattice parameter, and d-value of TiC x N 1 − x coatings were successfully varied by controlling the CH 4 fraction (CH 4 /N 2 ratio). With the increase in CH 4 fraction, the intensity of C and N within the TiC x N 1 − x coatings increased and decreased, respectively. Consequently, the C―Ti and C―N bonds were increased and N―Ti bonds were decreased.

AB - The properties of titanium carbonitride (TiCN) can be controlled by maintaining the C―N ratio within the coating to a certain level. An experimental study was carried out to vary the composition and properties of TiCN using cathodic arc physical vapour deposition (CAPVD). The substrate used was tungsten carbide (WC-6Co), which was prepared in-house through a powder metallurgy process. In order to form the TiC x N 1 − x coatings, titanium (Ti) was used as the cathode, while methane (CH 4 ) and nitrogen (N 2 ) gases were used as sources for C and N, respectively. X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD) were used to investigate the composition, chemical state, and bonding structure of the deposited coatings. The results show that the composition, intensity of elements, lattice parameter, and d-value of TiC x N 1 − x coatings were successfully varied by controlling the CH 4 fraction (CH 4 /N 2 ratio). With the increase in CH 4 fraction, the intensity of C and N within the TiC x N 1 − x coatings increased and decreased, respectively. Consequently, the C―Ti and C―N bonds were increased and N―Ti bonds were decreased.

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