Study of interdigitated electrode sensor for lab-on-chip applications

Mohammadmahdi Vakilian, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, interdigitated electrodes (IDEs) are studied. IDEs are one of the most popular transducers, widely employed in various technological and analytical applications, especially in the field of biological and chemical sensors due to their low cost, ease of fabrication process and excellent sensitivity. The increasing demand for lab-on-chip (LoC) devices and for designing miniaturized sensors, it becomes essential to utilize of such transducers. In the current study, MEMS module of Comsol multiphysics software is used for the simulation of IDE sensor. The dependence of the IDE capacitance on the geometric parameters including IDE finger spacing, thickness, width, sensor spatial wavelength and sensitive layer thickness are discussed.

Original languageEnglish
Title of host publicationIEEE International Conference on Semiconductor Electronics, Proceedings, ICSE
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages201-204
Number of pages4
ISBN (Print)9781479957606
DOIs
Publication statusPublished - 10 Oct 2014
Event11th IEEE International Conference on Semiconductor Electronics, ICSE 2014 - Kuala Lumpur
Duration: 27 Aug 201429 Aug 2014

Other

Other11th IEEE International Conference on Semiconductor Electronics, ICSE 2014
CityKuala Lumpur
Period27/8/1429/8/14

Fingerprint

Electrodes
Sensors
Transducers
Chemical sensors
MEMS
Capacitance
Fabrication
Wavelength
Costs

Keywords

  • capacitance
  • interdigitated electrode
  • lab-on-chip
  • sensor

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Vakilian, M., & Yeop Majlis, B. (2014). Study of interdigitated electrode sensor for lab-on-chip applications. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE (pp. 201-204). [6920831] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2014.6920831

Study of interdigitated electrode sensor for lab-on-chip applications. / Vakilian, Mohammadmahdi; Yeop Majlis, Burhanuddin.

IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. p. 201-204 6920831.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Vakilian, M & Yeop Majlis, B 2014, Study of interdigitated electrode sensor for lab-on-chip applications. in IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE., 6920831, Institute of Electrical and Electronics Engineers Inc., pp. 201-204, 11th IEEE International Conference on Semiconductor Electronics, ICSE 2014, Kuala Lumpur, 27/8/14. https://doi.org/10.1109/SMELEC.2014.6920831
Vakilian M, Yeop Majlis B. Study of interdigitated electrode sensor for lab-on-chip applications. In IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc. 2014. p. 201-204. 6920831 https://doi.org/10.1109/SMELEC.2014.6920831
Vakilian, Mohammadmahdi ; Yeop Majlis, Burhanuddin. / Study of interdigitated electrode sensor for lab-on-chip applications. IEEE International Conference on Semiconductor Electronics, Proceedings, ICSE. Institute of Electrical and Electronics Engineers Inc., 2014. pp. 201-204
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