Structural changes of a-CNx thin films induced by thermal annealing

Siti Aisyah Abd Aziz, Rozidawati Awang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this work, amorphous carbon nitride (a-CNx) thin films were deposited by radio frequency plasma enhanced chemical vapor deposition (RF-PECVD) technique at different RF powers of 60, 70, 80, 90 and 100?W for 30?min. These films were prepared using a mixture of acetylene (C2H2) at 20 sccm and nitrogen (N2) gases at 50 sccm. The films were then annealed at 400°C in a quartz tube furnace in argon (Ar) gas. The chemical bondings of the film were analyzed by Fourier Transform Infra-red Spectroscopy (FTIR) while surface morphology and film roughness were determined by Atomic Force Microscopy (AFM). The FTIR analysis reveals that annealing resulted in the loss of C-H and C-N bonds and formation of graphitic sp2C cluster with the dissociation of N and C in the films. AFM indicates that the film surface becomes less rough which effectually enhances structural modifications and the rearrangement of the microstructure of the films after annealing.

Original languageEnglish
Title of host publication2017 UKM FST Postgraduate Colloquium
Subtitle of host publicationProceedings of the University Kebangsaan Malaysia, Faculty of Science and Technology 2017 Postgraduate Colloquium
PublisherAmerican Institute of Physics Inc.
Volume1940
ISBN (Electronic)9780735416321
DOIs
Publication statusPublished - 4 Apr 2018
Event2017 UKM FST Postgraduate Colloquium - Selangor, Malaysia
Duration: 12 Jul 201713 Jul 2017

Other

Other2017 UKM FST Postgraduate Colloquium
CountryMalaysia
CitySelangor
Period12/7/1713/7/17

Fingerprint

annealing
thin films
infrared spectroscopy
atomic force microscopy
carbon nitrides
gases
acetylene
furnaces
radio frequencies
roughness
quartz
argon
vapor deposition
dissociation
tubes
nitrogen
microstructure

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Aziz, S. A. A., & Awang, R. (2018). Structural changes of a-CNx thin films induced by thermal annealing. In 2017 UKM FST Postgraduate Colloquium: Proceedings of the University Kebangsaan Malaysia, Faculty of Science and Technology 2017 Postgraduate Colloquium (Vol. 1940). [020011] American Institute of Physics Inc.. https://doi.org/10.1063/1.5027926

Structural changes of a-CNx thin films induced by thermal annealing. / Aziz, Siti Aisyah Abd; Awang, Rozidawati.

2017 UKM FST Postgraduate Colloquium: Proceedings of the University Kebangsaan Malaysia, Faculty of Science and Technology 2017 Postgraduate Colloquium. Vol. 1940 American Institute of Physics Inc., 2018. 020011.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Aziz, SAA & Awang, R 2018, Structural changes of a-CNx thin films induced by thermal annealing. in 2017 UKM FST Postgraduate Colloquium: Proceedings of the University Kebangsaan Malaysia, Faculty of Science and Technology 2017 Postgraduate Colloquium. vol. 1940, 020011, American Institute of Physics Inc., 2017 UKM FST Postgraduate Colloquium, Selangor, Malaysia, 12/7/17. https://doi.org/10.1063/1.5027926
Aziz SAA, Awang R. Structural changes of a-CNx thin films induced by thermal annealing. In 2017 UKM FST Postgraduate Colloquium: Proceedings of the University Kebangsaan Malaysia, Faculty of Science and Technology 2017 Postgraduate Colloquium. Vol. 1940. American Institute of Physics Inc. 2018. 020011 https://doi.org/10.1063/1.5027926
Aziz, Siti Aisyah Abd ; Awang, Rozidawati. / Structural changes of a-CNx thin films induced by thermal annealing. 2017 UKM FST Postgraduate Colloquium: Proceedings of the University Kebangsaan Malaysia, Faculty of Science and Technology 2017 Postgraduate Colloquium. Vol. 1940 American Institute of Physics Inc., 2018.
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