Structural and optical properties of the nc-Si: H thin films irradiated by high energetic ion beams

Boon Tong Goh, Siew Kien Ngoi, Seong Ling Yap, Chiow San Wong, Chang Fu Dee, Saadah Abdul Rahman

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Hydrogenated nanocrystalline silicon (nc-Si:H) thin films deposited by radio-frequency plasma enhanced chemical vapour deposition was irradiated by an energetic ion beam source from a 3.3 kJ Mather type dense plasma focus device. The effects of the energetic ion beam irradiations on the structural and optical properties of the nc-Si:H thin films have been studied. The results show that the formation of Si nano-crystallites embedded within the amorphous matrix was enhanced with an increase in the number of shots (up to 60) of irradiation. This significantly influences the optical properties of the films which include a widening of the optical band gap, a decrease in structure disorder and exhibiting a wide range of photoluminescence (PL) emission spectra at room temperature. Correlations of the PL peak energy and intensity with the optical energy gap, crystalline volume fraction, silicon suboxide content and its relationship to the oxide defects in the variation of number of shots are also discussed.

Original languageEnglish
Pages (from-to)13-19
Number of pages7
JournalJournal of Non-Crystalline Solids
Volume363
Issue number1
DOIs
Publication statusPublished - 2013

Fingerprint

Ion beams
shot
Structural properties
Photoluminescence
Optical properties
ion beams
Irradiation
Nanocrystalline silicon
photoluminescence
optical properties
Thin films
plasma focus
irradiation
Optical band gaps
dense plasmas
silicon
Silicon
Plasma enhanced chemical vapor deposition
thin films
Crystallites

Keywords

  • Dense plasma focus
  • Energetic ion beam irradiation
  • nc-Si:H
  • Optical properties

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Ceramics and Composites
  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry

Cite this

Structural and optical properties of the nc-Si : H thin films irradiated by high energetic ion beams. / Goh, Boon Tong; Ngoi, Siew Kien; Yap, Seong Ling; Wong, Chiow San; Dee, Chang Fu; Rahman, Saadah Abdul.

In: Journal of Non-Crystalline Solids, Vol. 363, No. 1, 2013, p. 13-19.

Research output: Contribution to journalArticle

Goh, Boon Tong ; Ngoi, Siew Kien ; Yap, Seong Ling ; Wong, Chiow San ; Dee, Chang Fu ; Rahman, Saadah Abdul. / Structural and optical properties of the nc-Si : H thin films irradiated by high energetic ion beams. In: Journal of Non-Crystalline Solids. 2013 ; Vol. 363, No. 1. pp. 13-19.
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AU - Dee, Chang Fu

AU - Rahman, Saadah Abdul

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