Structural and electrical characteristics of room temperature sputtered ZnO

T. H. Chowdhury, M. A A Wadi, N. A. Khan, M. N. Imamzai, P. Chelvanathan, Mohd Hafidz Ruslan, Nowshad Amin, Md. Akhtaruzzaman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Thin films of ZnO were deposited on cleaned soda lime glass substrates by using RF magnetron sputtering technique for deposition time of 20mins, 40mins, 60mins, 80mins and 100mins at room temperature. The structural and electrical properties of ZnO thin films were obtained from X-ray diffraction (XRD), Atomic force microscopy (AFM) and Hall Effect measurement. XRD results confirm the presence of (002) crystal orientation of ZnO and improvement of grain size was observed for films with higher deposition time. The average and the R.M.S roughness have been measured from the AFM images and the Hall Effect measurement confirms the carrier concentration, resistivity and mobility. Hall Effect data revealed that the mobility of the carriers of ZnO thin films increased with higher deposition time.

Original languageEnglish
Title of host publication2015 IEEE Student Conference on Research and Development, SCOReD 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages335-338
Number of pages4
ISBN (Print)9781467395724
DOIs
Publication statusPublished - 7 Apr 2016
EventIEEE Student Conference on Research and Development, SCOReD 2015 - Kuala Lumpur, Malaysia
Duration: 13 Dec 201514 Dec 2015

Other

OtherIEEE Student Conference on Research and Development, SCOReD 2015
CountryMalaysia
CityKuala Lumpur
Period13/12/1514/12/15

Fingerprint

Hall effect
Thin films
Atomic force microscopy
X ray diffraction
Lime
Crystal orientation
Magnetron sputtering
Temperature
Carrier concentration
Structural properties
Electric properties
Surface roughness
Glass
Substrates

Keywords

  • AFM
  • Hall Effect Measurement
  • RF Magnetron Sputtering
  • XRD
  • ZnO thin films

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Energy Engineering and Power Technology
  • Computer Networks and Communications
  • Computer Science Applications

Cite this

Chowdhury, T. H., Wadi, M. A. A., Khan, N. A., Imamzai, M. N., Chelvanathan, P., Ruslan, M. H., ... Akhtaruzzaman, M. (2016). Structural and electrical characteristics of room temperature sputtered ZnO. In 2015 IEEE Student Conference on Research and Development, SCOReD 2015 (pp. 335-338). [7449351] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SCORED.2015.7449351

Structural and electrical characteristics of room temperature sputtered ZnO. / Chowdhury, T. H.; Wadi, M. A A; Khan, N. A.; Imamzai, M. N.; Chelvanathan, P.; Ruslan, Mohd Hafidz; Amin, Nowshad; Akhtaruzzaman, Md.

2015 IEEE Student Conference on Research and Development, SCOReD 2015. Institute of Electrical and Electronics Engineers Inc., 2016. p. 335-338 7449351.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Chowdhury, TH, Wadi, MAA, Khan, NA, Imamzai, MN, Chelvanathan, P, Ruslan, MH, Amin, N & Akhtaruzzaman, M 2016, Structural and electrical characteristics of room temperature sputtered ZnO. in 2015 IEEE Student Conference on Research and Development, SCOReD 2015., 7449351, Institute of Electrical and Electronics Engineers Inc., pp. 335-338, IEEE Student Conference on Research and Development, SCOReD 2015, Kuala Lumpur, Malaysia, 13/12/15. https://doi.org/10.1109/SCORED.2015.7449351
Chowdhury TH, Wadi MAA, Khan NA, Imamzai MN, Chelvanathan P, Ruslan MH et al. Structural and electrical characteristics of room temperature sputtered ZnO. In 2015 IEEE Student Conference on Research and Development, SCOReD 2015. Institute of Electrical and Electronics Engineers Inc. 2016. p. 335-338. 7449351 https://doi.org/10.1109/SCORED.2015.7449351
Chowdhury, T. H. ; Wadi, M. A A ; Khan, N. A. ; Imamzai, M. N. ; Chelvanathan, P. ; Ruslan, Mohd Hafidz ; Amin, Nowshad ; Akhtaruzzaman, Md. / Structural and electrical characteristics of room temperature sputtered ZnO. 2015 IEEE Student Conference on Research and Development, SCOReD 2015. Institute of Electrical and Electronics Engineers Inc., 2016. pp. 335-338
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