Stress analysis of perforated graphene nano-electro-mechanical (NEM) contact switches by 3D finite element simulation

Mohd Amir Zulkefli, Mohd Ambri Mohamed, Kim Shyong Siow, Burhanuddin Yeop Majlis, Jothiramalingam Kulothungan, Manoharan Muruganathan, Hiroshi Mizuta

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this article, we report the finite element method (FEM) simulation of the suspended double-clamped graphene beam-based NEM switches with standard and perforated beam structures, to analyze the von Mises stress, the contour plot and the electrical field distribution by using FEM simulator provided by IntelliSuite and COMSOL software. This FEM numerical model is used to observe the scaling characteristics of the graphene beam-based NEM switch. The FEM results confirm that the von Mises stress value reduced by ~2–3% for every 0.1 µm increment of the standard graphene beam length. The introduction of perforation in the case of HL = 150 nm, HW = 100 nm and DL = 100 nm, further reduced the von Mises stress at the graphene beam end and the beam center by approximately ~20–35 and ~10–20%, respectively. These low values of von Mises stress along the graphene beam resulted in a lower probability of the device failure. In addition, the strong electrostatic force at the hole’s edges and beam's edges leads to a larger mechanical deflection at the edges compared to the beam center and it is consistent with the analysis of von Mises stress. The results presented here are expected to accelerate developments in the working dimension and parameter of the graphene NEM switch device fabrication for better mechanical reliability operation.

Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalMicrosystem Technologies
DOIs
Publication statusAccepted/In press - 6 Jul 2017

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Graphite
stress analysis
Stress analysis
Graphene
graphene
switches
Switches
Finite element method
simulation
finite element method
Electrostatic force
Numerical models
perforation
Simulators
Fabrication
simulators
deflection
plots
electrostatics
computer programs

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

Cite this

Stress analysis of perforated graphene nano-electro-mechanical (NEM) contact switches by 3D finite element simulation. / Zulkefli, Mohd Amir; Mohamed, Mohd Ambri; Siow, Kim Shyong; Yeop Majlis, Burhanuddin; Kulothungan, Jothiramalingam; Muruganathan, Manoharan; Mizuta, Hiroshi.

In: Microsystem Technologies, 06.07.2017, p. 1-9.

Research output: Contribution to journalArticle

@article{7e2884a965fa49d59b275f362390767f,
title = "Stress analysis of perforated graphene nano-electro-mechanical (NEM) contact switches by 3D finite element simulation",
abstract = "In this article, we report the finite element method (FEM) simulation of the suspended double-clamped graphene beam-based NEM switches with standard and perforated beam structures, to analyze the von Mises stress, the contour plot and the electrical field distribution by using FEM simulator provided by IntelliSuite and COMSOL software. This FEM numerical model is used to observe the scaling characteristics of the graphene beam-based NEM switch. The FEM results confirm that the von Mises stress value reduced by ~2–3{\%} for every 0.1 µm increment of the standard graphene beam length. The introduction of perforation in the case of HL = 150 nm, HW = 100 nm and DL = 100 nm, further reduced the von Mises stress at the graphene beam end and the beam center by approximately ~20–35 and ~10–20{\%}, respectively. These low values of von Mises stress along the graphene beam resulted in a lower probability of the device failure. In addition, the strong electrostatic force at the hole’s edges and beam's edges leads to a larger mechanical deflection at the edges compared to the beam center and it is consistent with the analysis of von Mises stress. The results presented here are expected to accelerate developments in the working dimension and parameter of the graphene NEM switch device fabrication for better mechanical reliability operation.",
author = "Zulkefli, {Mohd Amir} and Mohamed, {Mohd Ambri} and Siow, {Kim Shyong} and {Yeop Majlis}, Burhanuddin and Jothiramalingam Kulothungan and Manoharan Muruganathan and Hiroshi Mizuta",
year = "2017",
month = "7",
day = "6",
doi = "10.1007/s00542-017-3483-9",
language = "English",
pages = "1--9",
journal = "Microsystem Technologies",
issn = "0946-7076",
publisher = "Springer Verlag",

}

TY - JOUR

T1 - Stress analysis of perforated graphene nano-electro-mechanical (NEM) contact switches by 3D finite element simulation

AU - Zulkefli, Mohd Amir

AU - Mohamed, Mohd Ambri

AU - Siow, Kim Shyong

AU - Yeop Majlis, Burhanuddin

AU - Kulothungan, Jothiramalingam

AU - Muruganathan, Manoharan

AU - Mizuta, Hiroshi

PY - 2017/7/6

Y1 - 2017/7/6

N2 - In this article, we report the finite element method (FEM) simulation of the suspended double-clamped graphene beam-based NEM switches with standard and perforated beam structures, to analyze the von Mises stress, the contour plot and the electrical field distribution by using FEM simulator provided by IntelliSuite and COMSOL software. This FEM numerical model is used to observe the scaling characteristics of the graphene beam-based NEM switch. The FEM results confirm that the von Mises stress value reduced by ~2–3% for every 0.1 µm increment of the standard graphene beam length. The introduction of perforation in the case of HL = 150 nm, HW = 100 nm and DL = 100 nm, further reduced the von Mises stress at the graphene beam end and the beam center by approximately ~20–35 and ~10–20%, respectively. These low values of von Mises stress along the graphene beam resulted in a lower probability of the device failure. In addition, the strong electrostatic force at the hole’s edges and beam's edges leads to a larger mechanical deflection at the edges compared to the beam center and it is consistent with the analysis of von Mises stress. The results presented here are expected to accelerate developments in the working dimension and parameter of the graphene NEM switch device fabrication for better mechanical reliability operation.

AB - In this article, we report the finite element method (FEM) simulation of the suspended double-clamped graphene beam-based NEM switches with standard and perforated beam structures, to analyze the von Mises stress, the contour plot and the electrical field distribution by using FEM simulator provided by IntelliSuite and COMSOL software. This FEM numerical model is used to observe the scaling characteristics of the graphene beam-based NEM switch. The FEM results confirm that the von Mises stress value reduced by ~2–3% for every 0.1 µm increment of the standard graphene beam length. The introduction of perforation in the case of HL = 150 nm, HW = 100 nm and DL = 100 nm, further reduced the von Mises stress at the graphene beam end and the beam center by approximately ~20–35 and ~10–20%, respectively. These low values of von Mises stress along the graphene beam resulted in a lower probability of the device failure. In addition, the strong electrostatic force at the hole’s edges and beam's edges leads to a larger mechanical deflection at the edges compared to the beam center and it is consistent with the analysis of von Mises stress. The results presented here are expected to accelerate developments in the working dimension and parameter of the graphene NEM switch device fabrication for better mechanical reliability operation.

UR - http://www.scopus.com/inward/record.url?scp=85021963392&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85021963392&partnerID=8YFLogxK

U2 - 10.1007/s00542-017-3483-9

DO - 10.1007/s00542-017-3483-9

M3 - Article

AN - SCOPUS:85021963392

SP - 1

EP - 9

JO - Microsystem Technologies

JF - Microsystem Technologies

SN - 0946-7076

ER -