Straight Bridge Beams with Centered Diaphragm (SBBCD) design for MEMS cochlear biomodel

Thailis Bounya Ngelayang, Burhanuddin Yeop Majlis, Latif Rhonira

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper presents the development of an artificial basilar membrane (ABM) in order to biologically mimic the performance of a cochlea in human auditory system. The developed ABM should operate in an audible frequency range of a normal human ear which is in between 20 Hz to 20000 Hz. Two microelectromechanical system (MEMS) cochlear biomodel design; Straight Bridge Beams (SBB) and Straight Bridge Beams with Centered Diaphragm (SBBCD), have been considered for ABM development. Comsol Multiphysics software is used to design ABM and simulate their performance in terms of resonant frequency and static capacitance. SBB MEMS cochlear biomodel was designed with the dimension of 0.5 μm thickness, 20 μm width and in a range of 275 μm to 7700 μm length. As for SBBCD MEMS cochlear biomodel, an additional circular diaphragm with a diameter size of 75 μm is introduced to the center of the beam length. The SBBCD MEMS cochlear biomodel gave better performance with 2.84 % - 49.47 % of resonant frequency reduction and 9.44 % - 141.95 % of static capacitance increment in comparison with SBB MEMS cochlear biomodel.

Original languageEnglish
Title of host publication2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages13-16
Number of pages4
Volume2016-September
ISBN (Electronic)9781509023837
DOIs
Publication statusPublished - 21 Sep 2016
Event12th IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Bangsar, Kuala Lumpur, Malaysia
Duration: 17 Aug 201619 Aug 2016

Other

Other12th IEEE International Conference on Semiconductor Electronics, ICSE 2016
CountryMalaysia
CityBangsar, Kuala Lumpur
Period17/8/1619/8/16

Fingerprint

Diaphragms
MEMS
Membranes
Natural frequencies
Capacitance

Keywords

  • capacitance
  • cochlear biomodel
  • microbridge resonator
  • Microelectromechanical system
  • resonant frequency
  • straight bridge beams
  • straight bridge beams with centered diaphragm

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Ngelayang, T. B., Yeop Majlis, B., & Rhonira, L. (2016). Straight Bridge Beams with Centered Diaphragm (SBBCD) design for MEMS cochlear biomodel. In 2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings (Vol. 2016-September, pp. 13-16). [7573579] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SMELEC.2016.7573579

Straight Bridge Beams with Centered Diaphragm (SBBCD) design for MEMS cochlear biomodel. / Ngelayang, Thailis Bounya; Yeop Majlis, Burhanuddin; Rhonira, Latif.

2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings. Vol. 2016-September Institute of Electrical and Electronics Engineers Inc., 2016. p. 13-16 7573579.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ngelayang, TB, Yeop Majlis, B & Rhonira, L 2016, Straight Bridge Beams with Centered Diaphragm (SBBCD) design for MEMS cochlear biomodel. in 2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings. vol. 2016-September, 7573579, Institute of Electrical and Electronics Engineers Inc., pp. 13-16, 12th IEEE International Conference on Semiconductor Electronics, ICSE 2016, Bangsar, Kuala Lumpur, Malaysia, 17/8/16. https://doi.org/10.1109/SMELEC.2016.7573579
Ngelayang TB, Yeop Majlis B, Rhonira L. Straight Bridge Beams with Centered Diaphragm (SBBCD) design for MEMS cochlear biomodel. In 2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings. Vol. 2016-September. Institute of Electrical and Electronics Engineers Inc. 2016. p. 13-16. 7573579 https://doi.org/10.1109/SMELEC.2016.7573579
Ngelayang, Thailis Bounya ; Yeop Majlis, Burhanuddin ; Rhonira, Latif. / Straight Bridge Beams with Centered Diaphragm (SBBCD) design for MEMS cochlear biomodel. 2016 IEEE International Conference on Semiconductor Electronics, ICSE 2016 - Proceedings. Vol. 2016-September Institute of Electrical and Electronics Engineers Inc., 2016. pp. 13-16
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