Stiffness and frequency analysis of microaccelerometer

Wai Chi Wong, Ishak Hj Abdul Azid, Burhanuddin Yeop Majlis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This study used finite element analysis (FEA) to simulate and analyze the mechanical performance of the comb-finger type capacitive accelerometer. Structure modeling by using ANSYS® 8.1 is validated by the available data. The success of the model in predicting the stiffness constant and resonant frequency of the proof mass of accelerometer provides further encouragement in using the model to analyze the performance of the device for various combinations of geometry and different design in suspension beam. The suitability of different type suspension beam with different application in accelerometer is then suggested.

Original languageEnglish
Title of host publicationProceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium
Pages341-346
Number of pages6
DOIs
Publication statusPublished - 2006
Event31st International Electronics Manufacturing Technology Conference, IEMT 2006 - Petaling Jaya
Duration: 8 Nov 200610 Nov 2006

Other

Other31st International Electronics Manufacturing Technology Conference, IEMT 2006
CityPetaling Jaya
Period8/11/0610/11/06

Fingerprint

Accelerometers
Stiffness
Natural frequencies
Finite element method
Geometry

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Wong, W. C., Azid, I. H. A., & Yeop Majlis, B. (2006). Stiffness and frequency analysis of microaccelerometer. In Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium (pp. 341-346). [4456477] https://doi.org/10.1109/IEMT.2006.4456477

Stiffness and frequency analysis of microaccelerometer. / Wong, Wai Chi; Azid, Ishak Hj Abdul; Yeop Majlis, Burhanuddin.

Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium. 2006. p. 341-346 4456477.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Wong, WC, Azid, IHA & Yeop Majlis, B 2006, Stiffness and frequency analysis of microaccelerometer. in Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium., 4456477, pp. 341-346, 31st International Electronics Manufacturing Technology Conference, IEMT 2006, Petaling Jaya, 8/11/06. https://doi.org/10.1109/IEMT.2006.4456477
Wong WC, Azid IHA, Yeop Majlis B. Stiffness and frequency analysis of microaccelerometer. In Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium. 2006. p. 341-346. 4456477 https://doi.org/10.1109/IEMT.2006.4456477
Wong, Wai Chi ; Azid, Ishak Hj Abdul ; Yeop Majlis, Burhanuddin. / Stiffness and frequency analysis of microaccelerometer. Proceedings of the IEEE/CPMT International Electronics Manufacturing Technology (IEMT) Symposium. 2006. pp. 341-346
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