Statistical optimization for process parameters to reduce variability of 32 nm PMOS transistor threshold voltage

H. A. Elgomati, Burhanuddin Yeop Majlis, I. Ahmad, F. Salehuddin, F. A. Hamid, Azami Zaharim, T. Z. Mohamad, P. R. Apte

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

This paper explains our investigation of the effect on 32 nm PMOS device threshold voltage (VTH) by four process parameters, namely HALO implantation, Source/Drain (S/D) implantation dose, compensation implantations, and silicide annealing time. Taguchi method determines the setting of process parameters in experimental design while analysis of variance (ANOVA) determines the influence of the main process parameters on threshold voltage. The fabrication processes of the transistor were performed by ATHENA fabrication simulator, while the electrical characterization of the device was done by an ATLAS characterization simulator. These two simulators were combined and the results were analyzed by Taguchi's method in order to aid in design and optimizing process parameters. Threshold voltage (Vth) results were used as the evaluation parameters. The results show that the VTH value of -0.10319 V is achieved for a 32 nm PMOS transistor. In conclusion, by utilizing Taguchi's method to analyze the effect of process parameters, we can adjust threshold voltage (VTH) for PMOS to a stable value of -0.10319 V that is well within ITRS prediction for a 32 nm PMOS transistor.

Original languageEnglish
Pages (from-to)2372-2379
Number of pages8
JournalInternational Journal of Physical Sciences
Volume6
Issue number10
Publication statusPublished - 18 May 2011

Fingerprint

Threshold voltage
threshold voltage
Taguchi methods
Transistors
transistors
optimization
Simulators
simulators
implantation
Fabrication
Analysis of variance (ANOVA)
Design of experiments
analysis of variance
design analysis
fabrication
Annealing
dosage
annealing
evaluation
predictions

Keywords

  • 32 nm PMOS device
  • Compensation implantation
  • HALO
  • S/D implantation
  • Taguchi's method
  • Threshold voltage

ASJC Scopus subject areas

  • Physics and Astronomy(all)
  • Electronic, Optical and Magnetic Materials

Cite this

Statistical optimization for process parameters to reduce variability of 32 nm PMOS transistor threshold voltage. / Elgomati, H. A.; Yeop Majlis, Burhanuddin; Ahmad, I.; Salehuddin, F.; Hamid, F. A.; Zaharim, Azami; Mohamad, T. Z.; Apte, P. R.

In: International Journal of Physical Sciences, Vol. 6, No. 10, 18.05.2011, p. 2372-2379.

Research output: Contribution to journalArticle

Elgomati, H. A. ; Yeop Majlis, Burhanuddin ; Ahmad, I. ; Salehuddin, F. ; Hamid, F. A. ; Zaharim, Azami ; Mohamad, T. Z. ; Apte, P. R. / Statistical optimization for process parameters to reduce variability of 32 nm PMOS transistor threshold voltage. In: International Journal of Physical Sciences. 2011 ; Vol. 6, No. 10. pp. 2372-2379.
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