Spin-on-glass (SOG) based insulator of stack coupled microcoils for mems sensors and actuators application

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2 Citations (Scopus)

Abstract

A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. It was observed that the spin speed and material preparation prior to the process affect to the thickness and surface quality of the layer. Through the annealing process at temperature 425°C in N2 atmospheric for 1 h, a 750 nm thin SOG layer with the surface roughness or the uniformity of about 1.5% can be achieved. Furthermore, the basic characteristics of the spiral coils, including the coupling characteristics and its parasitic capacitance were discussed in wide range of operating frequency. The results from this investigation showed a good prospect for the development of fully integrated planar magnetic field coupler and generator for sensing and actuating purposes.

Original languageEnglish
Pages (from-to)289-293
Number of pages5
JournalSains Malaysiana
Volume43
Issue number2
Publication statusPublished - Feb 2014

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Actuators
Glass
Sensors
MEMS
Surface properties
Capacitance
Surface roughness
Annealing
Magnetic fields
Fabrication
Thin films
Costs
Temperature

Keywords

  • Insulating layer
  • Mems fabrication
  • Sensor and actuator
  • Spin-on-glass
  • Stack coupled microcoils

ASJC Scopus subject areas

  • General

Cite this

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title = "Spin-on-glass (SOG) based insulator of stack coupled microcoils for mems sensors and actuators application",
abstract = "A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. It was observed that the spin speed and material preparation prior to the process affect to the thickness and surface quality of the layer. Through the annealing process at temperature 425°C in N2 atmospheric for 1 h, a 750 nm thin SOG layer with the surface roughness or the uniformity of about 1.5{\%} can be achieved. Furthermore, the basic characteristics of the spiral coils, including the coupling characteristics and its parasitic capacitance were discussed in wide range of operating frequency. The results from this investigation showed a good prospect for the development of fully integrated planar magnetic field coupler and generator for sensing and actuating purposes.",
keywords = "Insulating layer, Mems fabrication, Sensor and actuator, Spin-on-glass, Stack coupled microcoils",
author = "Jumril Yunas and {Yeop Majlis}, Burhanuddin and Hamzah, {Azrul Azlan} and Badariah Bais",
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T1 - Spin-on-glass (SOG) based insulator of stack coupled microcoils for mems sensors and actuators application

AU - Yunas, Jumril

AU - Yeop Majlis, Burhanuddin

AU - Hamzah, Azrul Azlan

AU - Bais, Badariah

PY - 2014/2

Y1 - 2014/2

N2 - A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. It was observed that the spin speed and material preparation prior to the process affect to the thickness and surface quality of the layer. Through the annealing process at temperature 425°C in N2 atmospheric for 1 h, a 750 nm thin SOG layer with the surface roughness or the uniformity of about 1.5% can be achieved. Furthermore, the basic characteristics of the spiral coils, including the coupling characteristics and its parasitic capacitance were discussed in wide range of operating frequency. The results from this investigation showed a good prospect for the development of fully integrated planar magnetic field coupler and generator for sensing and actuating purposes.

AB - A comprehensive study on the SOG (Spin-on-Glass) based thin film insulating layer is presented. The SOG layer has been fabricated using simple MEMS technology which can play an important role as insulating layer of stack coupled microcoils. The fabrication process utilizes a simple, cost effective process technique as well as CMOS compatible resulting to a reproducible and good controlled process. It was observed that the spin speed and material preparation prior to the process affect to the thickness and surface quality of the layer. Through the annealing process at temperature 425°C in N2 atmospheric for 1 h, a 750 nm thin SOG layer with the surface roughness or the uniformity of about 1.5% can be achieved. Furthermore, the basic characteristics of the spiral coils, including the coupling characteristics and its parasitic capacitance were discussed in wide range of operating frequency. The results from this investigation showed a good prospect for the development of fully integrated planar magnetic field coupler and generator for sensing and actuating purposes.

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KW - Mems fabrication

KW - Sensor and actuator

KW - Spin-on-glass

KW - Stack coupled microcoils

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