Speckle techniques for noncontact temperature measurement

D. Burckel, Saleem H. Zaidi, M. K. Lang, A. Frauenglass, S. R J Brueck

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Two complementary speckle techniques for the measurement of temperature from the rough back surface of Si wafers during rapid thermal processing are demonstrated. Electronic speckle pattern interferometry is a full field intensity cross-correlation technique that provides a two-dimensional map of the surface temperature. Measurements are presented that demonstrate a resolution of approx. ±2°C. A new speckle technique, sub-feature speckle interferometry is introduced. This technique provides a much more rapid and precise averaged temperature measurement by monitoring the strain between two points with interferometric precision usually associated with moire interferometry or holography rather than speckle. Preliminary measurements are presented that demonstrate the capability of the technique.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages17-22
Number of pages6
Volume342
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the 1994 Spring Meeting of the Materials Research Society - San Francisco, CA, USA
Duration: 4 Apr 19947 Apr 1994

Other

OtherProceedings of the 1994 Spring Meeting of the Materials Research Society
CitySan Francisco, CA, USA
Period4/4/947/4/94

Fingerprint

Speckle
Temperature measurement
Interferometry
Rapid thermal processing
Holography
Temperature
Monitoring

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Burckel, D., Zaidi, S. H., Lang, M. K., Frauenglass, A., & Brueck, S. R. J. (1994). Speckle techniques for noncontact temperature measurement. In Materials Research Society Symposium - Proceedings (Vol. 342, pp. 17-22). Materials Research Society.

Speckle techniques for noncontact temperature measurement. / Burckel, D.; Zaidi, Saleem H.; Lang, M. K.; Frauenglass, A.; Brueck, S. R J.

Materials Research Society Symposium - Proceedings. Vol. 342 Materials Research Society, 1994. p. 17-22.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Burckel, D, Zaidi, SH, Lang, MK, Frauenglass, A & Brueck, SRJ 1994, Speckle techniques for noncontact temperature measurement. in Materials Research Society Symposium - Proceedings. vol. 342, Materials Research Society, pp. 17-22, Proceedings of the 1994 Spring Meeting of the Materials Research Society, San Francisco, CA, USA, 4/4/94.
Burckel D, Zaidi SH, Lang MK, Frauenglass A, Brueck SRJ. Speckle techniques for noncontact temperature measurement. In Materials Research Society Symposium - Proceedings. Vol. 342. Materials Research Society. 1994. p. 17-22
Burckel, D. ; Zaidi, Saleem H. ; Lang, M. K. ; Frauenglass, A. ; Brueck, S. R J. / Speckle techniques for noncontact temperature measurement. Materials Research Society Symposium - Proceedings. Vol. 342 Materials Research Society, 1994. pp. 17-22
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