Slotted capacitive microphone with sputtered aluminum diaphragm and photoresist sacrificial layer

Bahram Azizollah Ganji, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

12 Citations (Scopus)

Abstract

In this paper, we have fabricated a new microphone using aluminum (Al) slotted perforated diaphragm and back plate electrode, and photoresist (AZ1500) sacrificial layer on silicon wafer. The novelty of this method relies on aluminum diaphragm includes some slots to reduce the effect of residual stress and stiffness of diaphragm for increasing the microphone sensitivity. The acoustic holes are made on diaphragm to reduce the air damping, and avoid the disadvantages of non standard silicon processing for making back chamber and holes in back plate, which are more complex and expensive. Photoresist sacrificial layer is easy to deposition by spin coater and also easy to release by acetone. Moreover, acetone has a high selectivity to resist compared to silicon oxide and Al, thus it completely removes sacrificial resist without incurring significant damage silicon oxide and Al. The measured zero bias capacitance is 17.5 pF, and its pull-in voltage is 25 V. The microphone has been tested with external amplifier and speaker, the external amplifier was able to detect the sound waves from microphone on speaker and oscilloscope. The maximum amplitude of output speech signal of amplifier is 45 mV, and the maximum output of MEMS microphone is 1.125 μV.

Original languageEnglish
Pages (from-to)1803-1809
Number of pages7
JournalMicrosystem Technologies
Volume16
Issue number10
DOIs
Publication statusPublished - Oct 2010

Fingerprint

diaphragms
Photoresists
Microphones
Diaphragms
Aluminum
microphones
photoresists
aluminum
Aluminum Oxide
amplifiers
Silicon oxides
Acetone
silicon oxides
acetone
output
oscilloscopes
silicon
Silicon
Silicon wafers
sound waves

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Hardware and Architecture
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Slotted capacitive microphone with sputtered aluminum diaphragm and photoresist sacrificial layer. / Ganji, Bahram Azizollah; Yeop Majlis, Burhanuddin.

In: Microsystem Technologies, Vol. 16, No. 10, 10.2010, p. 1803-1809.

Research output: Contribution to journalArticle

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