Simulation of an analog differential capacitive accelerometer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

In this paper the simulation of an open-loop MEMS capacitive accelerometer in OrCAD (PSPICE A/D), include readout interface are presented. The charge amplifier technique is used for converting the capacitance change of accelerometer to electrical signal. The sensing element is modelled in system behavioural level of PSPICE and the interface circuit is modelled at component level.

Original languageEnglish
Title of host publicationProceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics
Pages331-334
Number of pages4
Publication statusPublished - 2004
Event2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004 - Kuala Lumpur
Duration: 4 Dec 20049 Dec 2004

Other

Other2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004
CityKuala Lumpur
Period4/12/049/12/04

Fingerprint

SPICE
Accelerometers
MEMS
Capacitance
Networks (circuits)

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Ahanchian, A., & Yeop Majlis, B. (2004). Simulation of an analog differential capacitive accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics (pp. 331-334). [1620899]

Simulation of an analog differential capacitive accelerometer. / Ahanchian, Ali; Yeop Majlis, Burhanuddin.

Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 331-334 1620899.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ahanchian, A & Yeop Majlis, B 2004, Simulation of an analog differential capacitive accelerometer. in Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics., 1620899, pp. 331-334, 2004 IEEE International Conference on Semiconductor Electronics, ICSE 2004, Kuala Lumpur, 4/12/04.
Ahanchian A, Yeop Majlis B. Simulation of an analog differential capacitive accelerometer. In Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. p. 331-334. 1620899
Ahanchian, Ali ; Yeop Majlis, Burhanuddin. / Simulation of an analog differential capacitive accelerometer. Proceedings ICSE 2004 - 2004 IEEE International Conference on Semiconductor Electronics. 2004. pp. 331-334
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