Si texturing with sub-wavelength structures

Saleem H. Zaidi, S. R J Brueck

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Citations (Scopus)

Abstract

Si surface reflection has been investigated with textured structures smaller than the optical wavelengths. This physical optics approach relies on absorption through a wave-guide mechanism, and has been realized for both uniform and random structures. Laser interferometric lithography techniques have been combined with conventional wet and reactive ion etching of Si to form a wide range of nanoscale 1-D & 2-D structures in both single & poly-crystalline Si substrates. Maskless reactive ion etching of Si has also been employed to form highly absorptive nanoscale structures. For identically etched structures, uniform structures showed an order of magnitude smaller reflectance than random structures.

Original languageEnglish
Title of host publicationConference Record of the IEEE Photovoltaic Specialists Conference
Editors Anon
PublisherIEEE
Pages171-174
Number of pages4
Publication statusPublished - 1997
Externally publishedYes
EventProceedings of the 1997 IEEE 26th Photovoltaic Specialists Conference - Anaheim, CA, USA
Duration: 29 Sep 19973 Oct 1997

Other

OtherProceedings of the 1997 IEEE 26th Photovoltaic Specialists Conference
CityAnaheim, CA, USA
Period29/9/973/10/97

Fingerprint

Texturing
Reactive ion etching
etching
Physical optics
physical optics
Wavelength
wavelengths
Lithography
ions
lithography
Crystalline materials
reflectance
Lasers
Substrates
lasers

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Condensed Matter Physics

Cite this

Zaidi, S. H., & Brueck, S. R. J. (1997). Si texturing with sub-wavelength structures. In Anon (Ed.), Conference Record of the IEEE Photovoltaic Specialists Conference (pp. 171-174). IEEE.

Si texturing with sub-wavelength structures. / Zaidi, Saleem H.; Brueck, S. R J.

Conference Record of the IEEE Photovoltaic Specialists Conference. ed. / Anon. IEEE, 1997. p. 171-174.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zaidi, SH & Brueck, SRJ 1997, Si texturing with sub-wavelength structures. in Anon (ed.), Conference Record of the IEEE Photovoltaic Specialists Conference. IEEE, pp. 171-174, Proceedings of the 1997 IEEE 26th Photovoltaic Specialists Conference, Anaheim, CA, USA, 29/9/97.
Zaidi SH, Brueck SRJ. Si texturing with sub-wavelength structures. In Anon, editor, Conference Record of the IEEE Photovoltaic Specialists Conference. IEEE. 1997. p. 171-174
Zaidi, Saleem H. ; Brueck, S. R J. / Si texturing with sub-wavelength structures. Conference Record of the IEEE Photovoltaic Specialists Conference. editor / Anon. IEEE, 1997. pp. 171-174
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