Scalable fabrication and optical characterization of nm Si structures

Saleem H. Zaidi, An Shyang Chu, S. R J Brueck

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

This paper reports on a scalable (to large areas) and manufacturable (to high volumes) fabrication technology for uniform, nm-linewidth Si structures providing an important testbed for controlled studies of these optical properties. Large areas (approx. 1 cm 2) of extreme sub-μm structures (to approx. 5 nm) are producibly fabricated. Both walls and wires are reported. Nearly perfect crystal planes form the sidewalls and very high width/depth aspect ratios have been achieved for the walls. Photoluminescence is observed for the thinnest samples and is as intense as that observed from porous Si with a spectral linewidth approx.50% smaller than that of porous Si.

Original languageEnglish
Title of host publicationMaterials Research Society Symposium - Proceedings
PublisherMaterials Research Society
Pages957-968
Number of pages12
Volume358
Publication statusPublished - 1995
Externally publishedYes
EventProceedings of the 1994 MRS Fall Meeting - Boston, MA, USA
Duration: 28 Nov 199430 Nov 1994

Other

OtherProceedings of the 1994 MRS Fall Meeting
CityBoston, MA, USA
Period28/11/9430/11/94

Fingerprint

Linewidth
Fabrication
Testbeds
Aspect ratio
Photoluminescence
Optical properties
Wire
Crystals

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Zaidi, S. H., Chu, A. S., & Brueck, S. R. J. (1995). Scalable fabrication and optical characterization of nm Si structures. In Materials Research Society Symposium - Proceedings (Vol. 358, pp. 957-968). Materials Research Society.

Scalable fabrication and optical characterization of nm Si structures. / Zaidi, Saleem H.; Chu, An Shyang; Brueck, S. R J.

Materials Research Society Symposium - Proceedings. Vol. 358 Materials Research Society, 1995. p. 957-968.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Zaidi, SH, Chu, AS & Brueck, SRJ 1995, Scalable fabrication and optical characterization of nm Si structures. in Materials Research Society Symposium - Proceedings. vol. 358, Materials Research Society, pp. 957-968, Proceedings of the 1994 MRS Fall Meeting, Boston, MA, USA, 28/11/94.
Zaidi SH, Chu AS, Brueck SRJ. Scalable fabrication and optical characterization of nm Si structures. In Materials Research Society Symposium - Proceedings. Vol. 358. Materials Research Society. 1995. p. 957-968
Zaidi, Saleem H. ; Chu, An Shyang ; Brueck, S. R J. / Scalable fabrication and optical characterization of nm Si structures. Materials Research Society Symposium - Proceedings. Vol. 358 Materials Research Society, 1995. pp. 957-968
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