RIE-texturing of industrial multicrystalline silicon solar cells

Douglas S. Ruby, Saleem H. Zaidi, Satoshi Yamanaka, S. Narayanan, Ruben Balanga

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The development of maskless plasma texturing technique for multicrystalline silicon (Si) cells using reactive ion etching (RIE) was discussed. The texture microstrcture was examined using scanning electron microscopy (SEM). The RIE texturing was done without causing performance-limiting damage to Si cells. Internal quantum efficiencies higher than those on planar and wet-textured cells were obtained, boosting cell currents and efficiencies by up to 6% on tricrystalline Si cells.

Original languageEnglish
Title of host publicationInternational Solar Energy Conference
EditorsM.D. Thornbloom, S.A. Jones
Pages399-403
Number of pages5
DOIs
Publication statusPublished - 2003
Externally publishedYes
Event2003 International Solar Energy Conference - Kohala Coast, HI
Duration: 15 Mar 200318 Mar 2003

Other

Other2003 International Solar Energy Conference
CityKohala Coast, HI
Period15/3/0318/3/03

Fingerprint

etching
Texturing
Silicon solar cells
Reactive ion etching
silicon
solar cells
Silicon
ion
cells
wet cells
ions
Quantum efficiency
Textures
texture
scanning electron microscopy
Plasmas
plasma
quantum efficiency
Scanning electron microscopy
damage

Keywords

  • Multicrystalline Silicon
  • Plasma-Texturization
  • Reactive Ion Etching
  • Reflectance Control

ASJC Scopus subject areas

  • Space and Planetary Science
  • Renewable Energy, Sustainability and the Environment

Cite this

Ruby, D. S., Zaidi, S. H., Yamanaka, S., Narayanan, S., & Balanga, R. (2003). RIE-texturing of industrial multicrystalline silicon solar cells. In M. D. Thornbloom, & S. A. Jones (Eds.), International Solar Energy Conference (pp. 399-403) https://doi.org/10.1115/ISEC2003-44003

RIE-texturing of industrial multicrystalline silicon solar cells. / Ruby, Douglas S.; Zaidi, Saleem H.; Yamanaka, Satoshi; Narayanan, S.; Balanga, Ruben.

International Solar Energy Conference. ed. / M.D. Thornbloom; S.A. Jones. 2003. p. 399-403.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Ruby, DS, Zaidi, SH, Yamanaka, S, Narayanan, S & Balanga, R 2003, RIE-texturing of industrial multicrystalline silicon solar cells. in MD Thornbloom & SA Jones (eds), International Solar Energy Conference. pp. 399-403, 2003 International Solar Energy Conference, Kohala Coast, HI, 15/3/03. https://doi.org/10.1115/ISEC2003-44003
Ruby DS, Zaidi SH, Yamanaka S, Narayanan S, Balanga R. RIE-texturing of industrial multicrystalline silicon solar cells. In Thornbloom MD, Jones SA, editors, International Solar Energy Conference. 2003. p. 399-403 https://doi.org/10.1115/ISEC2003-44003
Ruby, Douglas S. ; Zaidi, Saleem H. ; Yamanaka, Satoshi ; Narayanan, S. ; Balanga, Ruben. / RIE-texturing of industrial multicrystalline silicon solar cells. International Solar Energy Conference. editor / M.D. Thornbloom ; S.A. Jones. 2003. pp. 399-403
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