RF MEMS tunable filter using micro fixed-fixed beam

Md Fokhrul Islam, Mohd Alauddin Mohd Ali, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

2 Citations (Scopus)

Abstract

In this article, a tunable bandpass filter using micro fixed-fixed beam structure is designed, simulated, and fabricated. The filter is designed by micromachined capacitive bridges, with an original passive topology. The fabricated filter occupies a chip area of 12 × 3 mm2 and achieved an insertion loss of less than 2 dB and return loss of less than-15 dB throughout the operation band, thereby tuning the filter centre frequency by 11% between 8.76 and 9.8 GHz.

Original languageEnglish
Pages (from-to)592-597
Number of pages6
JournalMicrowave and Optical Technology Letters
Volume52
Issue number3
DOIs
Publication statusPublished - Mar 2010

Fingerprint

tunable filters
Insertion losses
Bandpass filters
microelectromechanical systems
MEMS
Tuning
Topology
filters
bandpass filters
insertion loss
topology
chips
tuning

Keywords

  • Fixed-fixed beam
  • Microelectromechanical systems (MEMS)
  • Tunable bandpass filter

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

Cite this

RF MEMS tunable filter using micro fixed-fixed beam. / Islam, Md Fokhrul; Ali, Mohd Alauddin Mohd; Yeop Majlis, Burhanuddin.

In: Microwave and Optical Technology Letters, Vol. 52, No. 3, 03.2010, p. 592-597.

Research output: Contribution to journalArticle

Islam, Md Fokhrul ; Ali, Mohd Alauddin Mohd ; Yeop Majlis, Burhanuddin. / RF MEMS tunable filter using micro fixed-fixed beam. In: Microwave and Optical Technology Letters. 2010 ; Vol. 52, No. 3. pp. 592-597.
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