RF MEMS tunable filter

Design, simulation and fabrication process

Md Fokhrul Islam, M. A. Mohd. Ali, Burhanuddin Yeop Majlis, Nowshad Amin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper deals with a tunable bandpass filter topology which controls both the central frequency and bandwidth. This tunable filter results from the association of MEMS (microelectromechanical system) fixed-fixed beam, used as variable capacitors, with an original passive topology. The design proposed in this paper is the metallic bridge over a coplanar microstrip couple line suspended in both sides by two metallic posts. This MEMS filter is designed for operation at X-band satisfying the implementation requirements for radar and modern multiband communication systems. The filter occupies a chip area of 12 × 3 mm2 and achieved an insertion loss of only 0.5 dB and return loss of less than-15 dB throughout the operation band, thereby tuning the filter center frequency by 11% between 8.76 to 9.8 GHz. The S parameters and electromechanical displacement simulations are also presented.

Original languageEnglish
Title of host publicationProceedings of ICECE 2008 - 5th International Conference on Electrical and Computer Engineering
Pages247-250
Number of pages4
DOIs
Publication statusPublished - 2008
Event5th International Conference on Electrical and Computer Engineering, ICECE 2008 - Dhaka
Duration: 20 Dec 200822 Dec 2008

Other

Other5th International Conference on Electrical and Computer Engineering, ICECE 2008
CityDhaka
Period20/12/0822/12/08

Fingerprint

MEMS
Topology
Fabrication
Microstrip lines
Scattering parameters
Insertion losses
Bandpass filters
Communication systems
Radar
Capacitors
Tuning
Bandwidth

ASJC Scopus subject areas

  • Computer Science Applications
  • Software
  • Electrical and Electronic Engineering

Cite this

Islam, M. F., Mohd. Ali, M. A., Yeop Majlis, B., & Amin, N. (2008). RF MEMS tunable filter: Design, simulation and fabrication process. In Proceedings of ICECE 2008 - 5th International Conference on Electrical and Computer Engineering (pp. 247-250). [4769209] https://doi.org/10.1109/ICECE.2008.4769209

RF MEMS tunable filter : Design, simulation and fabrication process. / Islam, Md Fokhrul; Mohd. Ali, M. A.; Yeop Majlis, Burhanuddin; Amin, Nowshad.

Proceedings of ICECE 2008 - 5th International Conference on Electrical and Computer Engineering. 2008. p. 247-250 4769209.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Islam, MF, Mohd. Ali, MA, Yeop Majlis, B & Amin, N 2008, RF MEMS tunable filter: Design, simulation and fabrication process. in Proceedings of ICECE 2008 - 5th International Conference on Electrical and Computer Engineering., 4769209, pp. 247-250, 5th International Conference on Electrical and Computer Engineering, ICECE 2008, Dhaka, 20/12/08. https://doi.org/10.1109/ICECE.2008.4769209
Islam MF, Mohd. Ali MA, Yeop Majlis B, Amin N. RF MEMS tunable filter: Design, simulation and fabrication process. In Proceedings of ICECE 2008 - 5th International Conference on Electrical and Computer Engineering. 2008. p. 247-250. 4769209 https://doi.org/10.1109/ICECE.2008.4769209
Islam, Md Fokhrul ; Mohd. Ali, M. A. ; Yeop Majlis, Burhanuddin ; Amin, Nowshad. / RF MEMS tunable filter : Design, simulation and fabrication process. Proceedings of ICECE 2008 - 5th International Conference on Electrical and Computer Engineering. 2008. pp. 247-250
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