RF MEMS-based tumable filter for X-band applications

Md Fokhrul Islam, M. A. Mohd. Ali, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

This study presents the application of RF MEMS based switches in tunable bandpass filter operating in the wireless X-band. The filter is designed on 635 μm-thick high-resistivity silicon substrate which is compatible with the new SiGe process. The design and simulation are performed using 3D full wave electromagnetic simulator IE3D. Tuning is achieved by the Metal-Air-Metal (MAM) based fixed-fixed beam shunt switches, which present variable capacitances along the lines of a parallel coupled bandpass filter, thereby tuning the filter center frequency by 3% between 9.8 to 10.1 GHz. The simulated filter occupies a chip area of 11.8×4.2 mm2 and achieved an insertion loss of only 0.7 dB over the frequency range of 8-11.4 GHz and return loss of less than -10 dB throughout the operation band. This filter is widely used today in radar, satellite and terrestrial communications and electronic countermeasure applications, both militarily and commercially.

Original languageEnglish
Pages (from-to)189-191
Number of pages3
JournalJournal of Applied Sciences
Volume8
Issue number1
Publication statusPublished - 2008

Fingerprint

Bandpass filters
MEMS
Tuning
Switches
Insertion losses
Metals
Electromagnetic waves
Radar
Capacitance
Simulators
Satellites
Silicon
Communication
Substrates
Air

Keywords

  • MAM
  • Microelectromechanical system
  • Microwave tunable filter
  • Parallel-coupled microstrip

ASJC Scopus subject areas

  • General

Cite this

RF MEMS-based tumable filter for X-band applications. / Islam, Md Fokhrul; Mohd. Ali, M. A.; Yeop Majlis, Burhanuddin.

In: Journal of Applied Sciences, Vol. 8, No. 1, 2008, p. 189-191.

Research output: Contribution to journalArticle

Islam, MF, Mohd. Ali, MA & Yeop Majlis, B 2008, 'RF MEMS-based tumable filter for X-band applications', Journal of Applied Sciences, vol. 8, no. 1, pp. 189-191.
Islam, Md Fokhrul ; Mohd. Ali, M. A. ; Yeop Majlis, Burhanuddin. / RF MEMS-based tumable filter for X-band applications. In: Journal of Applied Sciences. 2008 ; Vol. 8, No. 1. pp. 189-191.
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