Review—critical considerations of high quality graphene synthesized by plasma-enhanced chemical vapor deposition for electronic and energy storage devices

Mohd Asyadi Azam, Nor Najihah Zulkapli, Norasimah Dorah, Raja Noor Amalina Raja Seman, Mohd Hanafi Ani, Mohd Shukri Sirat, Edhuan Ismail, Fatin Bazilah Fauzi, Mohd Ambri Mohamed, Burhanuddin Yeop Majlis

Research output: Contribution to journalReview article

9 Citations (Scopus)

Abstract

Graphene is a promising electrode material not only due to its intrinsic properties like good electrical conductivity, high mechanical strength and high chemical stability, but also because of its high theoretical surface area of 2630 m2 g−1. In this report, the effect of CVD parameters to the growth of high quality graphene on metal substrates by using plasma enhanced chemical vapor deposition (PECVD) was extensively studied. Interestingly, synthesizing high quality graphene by PECVD technique is not only depending on the CVD parameters, but also depending on the catalysts and its plasma sources. It was found that Ni and Cu are the most favored metal catalysts for PECVD graphene growth. With high solubility of carbon (> 0.1 at. %), Ni effectively promote the growth of multilayer graphene by PECVD. However, large-area synthesis has made relatively inexpensive Cu as one of the most attractive substrates for monolayer graphene growth. Further details on the potential use of different transition metal catalysts in synthesizing graphene and consequently the specific usage of graphene based devices are discussed in this report.

Original languageEnglish
Pages (from-to)M3035-M3048
JournalECS Journal of Solid State Science and Technology
Volume6
Issue number6
DOIs
Publication statusPublished - 1 Jan 2017

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Plasma enhanced chemical vapor deposition
Energy storage
Graphene
Catalysts
Chemical vapor deposition
Metals
Plasma sources
Chemical stability
Substrates
Strength of materials
Transition metals
Monolayers
Multilayers
Carbon
Solubility
Electrodes

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Review—critical considerations of high quality graphene synthesized by plasma-enhanced chemical vapor deposition for electronic and energy storage devices. / Azam, Mohd Asyadi; Zulkapli, Nor Najihah; Dorah, Norasimah; Seman, Raja Noor Amalina Raja; Ani, Mohd Hanafi; Sirat, Mohd Shukri; Ismail, Edhuan; Fauzi, Fatin Bazilah; Mohamed, Mohd Ambri; Yeop Majlis, Burhanuddin.

In: ECS Journal of Solid State Science and Technology, Vol. 6, No. 6, 01.01.2017, p. M3035-M3048.

Research output: Contribution to journalReview article

Azam, Mohd Asyadi ; Zulkapli, Nor Najihah ; Dorah, Norasimah ; Seman, Raja Noor Amalina Raja ; Ani, Mohd Hanafi ; Sirat, Mohd Shukri ; Ismail, Edhuan ; Fauzi, Fatin Bazilah ; Mohamed, Mohd Ambri ; Yeop Majlis, Burhanuddin. / Review—critical considerations of high quality graphene synthesized by plasma-enhanced chemical vapor deposition for electronic and energy storage devices. In: ECS Journal of Solid State Science and Technology. 2017 ; Vol. 6, No. 6. pp. M3035-M3048.
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