Response surface methodology (RSM) in fabrication of nanostructured silicon

Ayu Wazira Azhari, Kamaruzzaman Sopian, Dewi Suriyani Che Halin, Abdul Haqi Ibrahim, Saleem H. Zaidi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

In this paper, a respond surface methodology (RSM) model has been developed using three levels Box-Benkhen experimental design (BBD) technique to study the influence of several metal-assisted chemical etching (MACE) process variables on the properties of nanostructured silicon (Si) wafer. Five process variables are examined i.e. concentrations of silver (Ag), hydrofluoric acid (HF), deposition time, H2O2concentration and etching time as a function of etching rate. Design-Expert®software (version 7.1) is used in formulating the RSM model of five factors with 46 experiments. A regression quadratic model is developed to correlate the process variables where the most significant factors are identified and validated using analysis of variance (ANOVA). The model for etching rate is found to be significant with R2of 0.8, where both Ag concentrations and etching time are the major influence.

Original languageEnglish
Title of host publicationMaterials Science Forum
PublisherTrans Tech Publications Ltd
Pages151-155
Number of pages5
Volume857
ISBN (Print)9783035710205
DOIs
Publication statusPublished - 2016
EventInternational Conference on Advanced Materials Engineering and Technology, ICAMET 2015 - Kaohsiung, Taiwan, Province of China
Duration: 4 Dec 20155 Dec 2015

Publication series

NameMaterials Science Forum
Volume857
ISSN (Print)02555476

Other

OtherInternational Conference on Advanced Materials Engineering and Technology, ICAMET 2015
CountryTaiwan, Province of China
CityKaohsiung
Period4/12/155/12/15

Fingerprint

Silicon
Etching
etching
methodology
Fabrication
fabrication
silicon
Hydrofluoric Acid
analysis of variance
Hydrofluoric acid
hydrofluoric acid
Analysis of variance (ANOVA)
Silicon wafers
Silver
Design of experiments
boxes
regression analysis
Metals
silver
wafers

Keywords

  • Box-behnken design
  • DoE
  • MACE
  • RSM
  • Si nanostructures

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanical Engineering
  • Mechanics of Materials

Cite this

Azhari, A. W., Sopian, K., Che Halin, D. S., Ibrahim, A. H., & Zaidi, S. H. (2016). Response surface methodology (RSM) in fabrication of nanostructured silicon. In Materials Science Forum (Vol. 857, pp. 151-155). (Materials Science Forum; Vol. 857). Trans Tech Publications Ltd. https://doi.org/10.4028/www.scientific.net/MSF.857.151

Response surface methodology (RSM) in fabrication of nanostructured silicon. / Azhari, Ayu Wazira; Sopian, Kamaruzzaman; Che Halin, Dewi Suriyani; Ibrahim, Abdul Haqi; Zaidi, Saleem H.

Materials Science Forum. Vol. 857 Trans Tech Publications Ltd, 2016. p. 151-155 (Materials Science Forum; Vol. 857).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Azhari, AW, Sopian, K, Che Halin, DS, Ibrahim, AH & Zaidi, SH 2016, Response surface methodology (RSM) in fabrication of nanostructured silicon. in Materials Science Forum. vol. 857, Materials Science Forum, vol. 857, Trans Tech Publications Ltd, pp. 151-155, International Conference on Advanced Materials Engineering and Technology, ICAMET 2015, Kaohsiung, Taiwan, Province of China, 4/12/15. https://doi.org/10.4028/www.scientific.net/MSF.857.151
Azhari AW, Sopian K, Che Halin DS, Ibrahim AH, Zaidi SH. Response surface methodology (RSM) in fabrication of nanostructured silicon. In Materials Science Forum. Vol. 857. Trans Tech Publications Ltd. 2016. p. 151-155. (Materials Science Forum). https://doi.org/10.4028/www.scientific.net/MSF.857.151
Azhari, Ayu Wazira ; Sopian, Kamaruzzaman ; Che Halin, Dewi Suriyani ; Ibrahim, Abdul Haqi ; Zaidi, Saleem H. / Response surface methodology (RSM) in fabrication of nanostructured silicon. Materials Science Forum. Vol. 857 Trans Tech Publications Ltd, 2016. pp. 151-155 (Materials Science Forum).
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