Reliability Assessment of Micromachined Fixed-Fixed Beam Based on FE Simulation and Probabilistic Sampling

Md Fokhrul Islam, Mohd Alauddin Mohd Ali, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

Recent trends in structural mechanics applications of finite-element methods (FEM) show an increasing demand for efficient analysis tools. This paper presents a realistic approach for modeling a fixed-fixed beam structure used in microelectromechanical systems based on finite-element analysis (FEA). The use of probabilistic methods to assess the electromechanical behavior of the beam under the presence of micromachine manufacturing and process uncertainties is also presented. The finite-element model of the beam is constructed using the commercial code ANSYS (10.0). In the standard approach of modeling, existing literature assumes deterministic values for design parameters. However, fabrication of the device introduces some amount of variation in these parameters. In this paper, the probabilistic approach is discussed to account for the variability in fabrication. FEA guides the design of fixed-fixed beam to achieve a robust and reliable design in a most efficient way. From the probabilistic analysis, it was observed that the changes in length and thickness tend to be the most influencing parameters, which need to be tightly controlled.

Original languageEnglish
Pages (from-to)664-670
Number of pages7
JournalIEEE Transactions on Device and Materials Reliability
Volume8
Issue number4
DOIs
Publication statusPublished - 2008

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Sampling
Finite element method
Fabrication
MEMS
Mechanics
Uncertainty

Keywords

  • Electromechanical
  • finite-element methods (FEMs)
  • microelectromechanical systems (MEMS)
  • probabilistic methods
  • uncertainty analysis

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Safety, Risk, Reliability and Quality
  • Electrical and Electronic Engineering

Cite this

Reliability Assessment of Micromachined Fixed-Fixed Beam Based on FE Simulation and Probabilistic Sampling. / Islam, Md Fokhrul; Mohd Ali, Mohd Alauddin; Yeop Majlis, Burhanuddin.

In: IEEE Transactions on Device and Materials Reliability, Vol. 8, No. 4, 2008, p. 664-670.

Research output: Contribution to journalArticle

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