Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD)

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This study focuses on the properties of ZTO which have been deposited by a low-cost method namely aerosol assisted chemical vapor deposition (AACVD). The precursors used in this method were zinc acetate dihidrate and tin chloride dihydrate for ZTO thin film deposition. Both precursors were mixed and stirred until fully dissolved before deposition. The ZTO was deposited on borosilicate glass substrate for the investigation of optical properties. The films deposited have passed the scotch tape adherence test. XRD revealed that the crystal ZTO is slightly in the form of perovskite structure but several deteriorations were also seen in the spectrum. The UV-Vis analysis showed high transmittance of ∼85% and the band gap was calculated to be 3.85 eV. The average thickness of the film is around 284â€?nm. The results showed that the ZTO thin films have been successfully deposited by the utilization of AACVD method.

Original languageEnglish
Title of host publication3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017
PublisherAmerican Institute of Physics Inc.
Volume1958
ISBN (Electronic)9780735416598
DOIs
Publication statusPublished - 9 May 2018
Event3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017 - Kuala Lumpur, Malaysia
Duration: 24 Oct 201725 Oct 2017

Other

Other3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017
CountryMalaysia
CityKuala Lumpur
Period24/10/1725/10/17

Fingerprint

zinc oxides
tin oxides
aerosols
vapor deposition
borosilicate glass
thin films
deterioration
tapes
acetates
tin
transmittance
zinc
chlorides
optical properties
crystals

Keywords

  • AACVD
  • Band gap
  • Perovskite
  • Thin Film
  • Transmittance

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Riza, M. A., Rahman, A. B. A., Sepeai, S., Ahmad Ludin, N., Mat Teridi, M. A., & Ibrahim, M. A. (2018). Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD). In 3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017 (Vol. 1958). [020026] American Institute of Physics Inc.. https://doi.org/10.1063/1.5034557

Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD). / Riza, Muhammad Arif; Rahman, Abu Bakar Abd; Sepeai, Suhaila; Ahmad Ludin, Norasikin; Mat Teridi, Mohd Asri; Ibrahim, Mohd. Adib.

3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017. Vol. 1958 American Institute of Physics Inc., 2018. 020026.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Riza, MA, Rahman, ABA, Sepeai, S, Ahmad Ludin, N, Mat Teridi, MA & Ibrahim, MA 2018, Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD). in 3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017. vol. 1958, 020026, American Institute of Physics Inc., 3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017, Kuala Lumpur, Malaysia, 24/10/17. https://doi.org/10.1063/1.5034557
Riza MA, Rahman ABA, Sepeai S, Ahmad Ludin N, Mat Teridi MA, Ibrahim MA. Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD). In 3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017. Vol. 1958. American Institute of Physics Inc. 2018. 020026 https://doi.org/10.1063/1.5034557
Riza, Muhammad Arif ; Rahman, Abu Bakar Abd ; Sepeai, Suhaila ; Ahmad Ludin, Norasikin ; Mat Teridi, Mohd Asri ; Ibrahim, Mohd. Adib. / Properties of zinc tin oxide thin film by aerosol assisted chemical vapor deposition (AACVD). 3rd International Conference on the Science and Engineering of Materials, ICoSEM 2017. Vol. 1958 American Institute of Physics Inc., 2018.
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