Probabilistic analysis of micro-machined fixed-fixed beam for reliability

Md Fokhrul Islam, M. A Mohd Ali, Burhanuddin Yeop Majlis

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

A realistic approach for modelling a fixed-fixed beam is presented. The use of probabilistic methods to assess the electromechanical behaviour of the beam under the presence of micro-machine manufacturing and process uncertainties is demonstrated. A finite-element model of the beam is constructed using the commercial code ANSYS (10.0). In the standard approach of modelling, existing literature assumes deterministic values for design parameters, however, fabrication of the device introduces some amount of variation in the design parameters. Here, the probabilistic approach is discussed to account for the variability in fabrication. Probabilistic analysis guides the design of the fixed-fixed beam to achieve a robust and reliable design in the most efficient way. The results of the probabilistic design approach on the performance characteristics such as maximum deflection and maximum stress will be discussed.

Original languageEnglish
Pages (from-to)95-100
Number of pages6
JournalMicro and Nano Letters
Volume3
Issue number3
DOIs
Publication statusPublished - 2008

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Fabrication
fabrication
deflection
manufacturing
Uncertainty

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Bioengineering
  • Biomedical Engineering

Cite this

Probabilistic analysis of micro-machined fixed-fixed beam for reliability. / Fokhrul Islam, Md; Ali, M. A Mohd; Yeop Majlis, Burhanuddin.

In: Micro and Nano Letters, Vol. 3, No. 3, 2008, p. 95-100.

Research output: Contribution to journalArticle

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