Preparation and physical properties of MoO 3 thin films

Muhammad Yahaya, Muhamad Mat Salleh, Ibrahim A. Talib, Norkamisah Mohd Nor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Thin films of MoO 3 were prepared by electron beam evaporation technique. The films were deposited onto glass substrates maintained at temperatures in the range 100-250 °C. The films were characterized by studying their structure, electrical and optical properties. The films formed at 100 °C are amorphous with conductivity of about 2.5 × 10 -5 Ω -1 cm -1. The effect of deposition temperature on the properties of the films were studied and discussed.

Original languageEnglish
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
Pages42-46
Number of pages5
Volume3175
DOIs
Publication statusPublished - 1998
Event3rd International Conference on Thin Film Physics and Applications - Shanghai, China
Duration: 15 Apr 199715 Apr 1997

Other

Other3rd International Conference on Thin Film Physics and Applications
CountryChina
CityShanghai
Period15/4/9715/4/97

Fingerprint

Physical property
Thin Films
Preparation
Physical properties
physical properties
Thin films
preparation
thin films
Electrical Properties
Electron Beam
Evaporation
Optical Properties
Conductivity
Electron beams
Electric properties
Optical properties
electrical properties
Substrate
evaporation
electron beams

Keywords

  • Electron beam evaporation
  • Molybdenum oxide
  • Thin film

ASJC Scopus subject areas

  • Applied Mathematics
  • Computer Science Applications
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics

Cite this

Yahaya, M., Mat Salleh, M., Talib, I. A., & Nor, N. M. (1998). Preparation and physical properties of MoO 3 thin films In Proceedings of SPIE - The International Society for Optical Engineering (Vol. 3175, pp. 42-46) https://doi.org/10.1117/12.300703

Preparation and physical properties of MoO 3 thin films . / Yahaya, Muhammad; Mat Salleh, Muhamad; Talib, Ibrahim A.; Nor, Norkamisah Mohd.

Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3175 1998. p. 42-46.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yahaya, M, Mat Salleh, M, Talib, IA & Nor, NM 1998, Preparation and physical properties of MoO 3 thin films in Proceedings of SPIE - The International Society for Optical Engineering. vol. 3175, pp. 42-46, 3rd International Conference on Thin Film Physics and Applications, Shanghai, China, 15/4/97. https://doi.org/10.1117/12.300703
Yahaya M, Mat Salleh M, Talib IA, Nor NM. Preparation and physical properties of MoO 3 thin films In Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3175. 1998. p. 42-46 https://doi.org/10.1117/12.300703
Yahaya, Muhammad ; Mat Salleh, Muhamad ; Talib, Ibrahim A. ; Nor, Norkamisah Mohd. / Preparation and physical properties of MoO 3 thin films Proceedings of SPIE - The International Society for Optical Engineering. Vol. 3175 1998. pp. 42-46
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