Piezoeletric micropump for drug delivery system fabricated using two optical masks

Research output: Chapter in Book/Report/Conference proceedingConference contribution

13 Citations (Scopus)

Abstract

In this study, a Piezoelectric Actuated Valveless Micropump (PAVM) has been designed and successfully fabricated using MEMS fabrication processes. A PZT: Pb (ZrTi) Ox (lead titanate zirconate) disc is used to actuate a silicon membrane by applying an alternating electrical field across the actuator. The resultant reciprocating movement of the pump membrane is then converted into pumping effect. Preliminary analysis of the fluidic characteristics of this micropump was performed using CoventorWare Simulator with MEMs-FSI (Fluid Structure Interaction) module to understand the working behaviour of the pump system. The pump is fabricated in a simple micromachining process with two optical masks using a double side polished silicon wafer. The tests carried out on the micropump have produced promising results to be used in the drug delivery system.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages279-282
Number of pages4
Volume74
DOIs
Publication statusPublished - 2009
EventInternational Conference on Materials for Advanced Technologies, ICMAT 2009 - Singpore
Duration: 28 Jun 20093 Jul 2009

Publication series

NameAdvanced Materials Research
Volume74
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT 2009
CitySingpore
Period28/6/093/7/09

Fingerprint

Masks
Pumps
Membranes
Fluid structure interaction
Micromachining
Fluidics
Silicon wafers
MEMS
Actuators
Simulators
Fabrication
Silicon
Drug Delivery Systems

Keywords

  • Drug delivery
  • FSI
  • MEMS
  • Piezoelectric micropump

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Johari, J., Yunas, J., & Yeop Majlis, B. (2009). Piezoeletric micropump for drug delivery system fabricated using two optical masks. In Advanced Materials Research (Vol. 74, pp. 279-282). (Advanced Materials Research; Vol. 74). https://doi.org/10.4028/www.scientific.net/AMR.74.279

Piezoeletric micropump for drug delivery system fabricated using two optical masks. / Johari, Juliana; Yunas, Jumril; Yeop Majlis, Burhanuddin.

Advanced Materials Research. Vol. 74 2009. p. 279-282 (Advanced Materials Research; Vol. 74).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Johari, J, Yunas, J & Yeop Majlis, B 2009, Piezoeletric micropump for drug delivery system fabricated using two optical masks. in Advanced Materials Research. vol. 74, Advanced Materials Research, vol. 74, pp. 279-282, International Conference on Materials for Advanced Technologies, ICMAT 2009, Singpore, 28/6/09. https://doi.org/10.4028/www.scientific.net/AMR.74.279
Johari, Juliana ; Yunas, Jumril ; Yeop Majlis, Burhanuddin. / Piezoeletric micropump for drug delivery system fabricated using two optical masks. Advanced Materials Research. Vol. 74 2009. pp. 279-282 (Advanced Materials Research).
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