Piezoelectric Micropump with nanoliter per minute flow for drug delivery systems

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

A Piezoelectric Actuated Valveless Micropump (PAVM) has been designed and successfully fabricated using MEMS fabrication processes. The micropump uses a PZT: Pb(ZrTi)Ox ceramic plate to actuate a silicon membrane which bends when a voltage is applied to the piezoelectric actuator. The resultant reciprocating movement of the pump membrane is then converted into pumping effect. By integrating dynamic passive valves into the device, the pump would then operate continuously with volumetric pumping rale determined by the frequency of the driving voltage. Simulation work to determine the micropump fluidic characteristics was performed using CoventorWare MemFSI™ module. The pump was fabricated on a double side polished silicon wafer via simple two-mask micromachining process. The fabricated micropump, having an outer dimension of 14 mm × 14 mm × 2 mm, was then tested with DI (deionized) water as the test liquid. A driving voltage of 16 V was applied to the PZT actuator. Pump rate of 4.98 nL per min was obtained at 0.673 kHz. The fabricated micropump envisages a promising pumping method to be implemented into drug delivery systems.

Original languageEnglish
Pages (from-to)275-281
Number of pages7
JournalSains Malaysiana
Volume40
Issue number3
Publication statusPublished - Mar 2011

Fingerprint

delivery
drugs
pumps
pumping
electric potential
membranes
piezoelectric actuators
fluidics
silicon
micromachining
microelectromechanical systems
masks
modules
actuators
wafers
ceramics
fabrication
liquids
water
simulation

Keywords

  • CoventorWare memfsi
  • Drug delivery
  • MEMS
  • PAVM
  • Piezoelectric micropump

ASJC Scopus subject areas

  • General

Cite this

Piezoelectric Micropump with nanoliter per minute flow for drug delivery systems. / Johari, Juliana; Yunas, Jumril; Hamzah, Azrul Azlan; Yeop Majlis, Burhanuddin.

In: Sains Malaysiana, Vol. 40, No. 3, 03.2011, p. 275-281.

Research output: Contribution to journalArticle

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