Photoacoustic measurements on thermal properties of hydrogenated amorphous carbon films: The effect of hydrogen dilution

Y. Y. Kim, Hasan Adli Alwi, Rozidawati Awang, S. Krishnaswamy

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Abstract

Thermal properties of hydrogenated amorphous carbon (a-C:H) thin-films are measured using an ultrafast optical pump-probe technique. The a-C:H samples were grown in a home-built direct-current (DC) plasma enhanced chemical vapor deposition (PECVD) system with varying hydrogen (H2) diluents to methane (CH4) flow-rate ratios. Thermal diffusivities of samples are extracted by comparing thermoreflectance measurements with numerical calculations so that thermal conductivities (k) can be determined. Although the dependence of thermal property on H2 dilution was not significant, our films show lower k (0.10-0.15 W/mK ± 20%) compared to the results of previous studies.

Original languageEnglish
Article number012006
JournalJournal of Physics: Conference Series
Volume278
Issue number1
DOIs
Publication statusPublished - 2011

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dilution
thermodynamic properties
diluents
carbon
hydrogen
thermal diffusivity
thermal conductivity
methane
flow velocity
direct current
vapor deposition
pumps
probes
thin films

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

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abstract = "Thermal properties of hydrogenated amorphous carbon (a-C:H) thin-films are measured using an ultrafast optical pump-probe technique. The a-C:H samples were grown in a home-built direct-current (DC) plasma enhanced chemical vapor deposition (PECVD) system with varying hydrogen (H2) diluents to methane (CH4) flow-rate ratios. Thermal diffusivities of samples are extracted by comparing thermoreflectance measurements with numerical calculations so that thermal conductivities (k) can be determined. Although the dependence of thermal property on H2 dilution was not significant, our films show lower k (0.10-0.15 W/mK ± 20{\%}) compared to the results of previous studies.",
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AU - Krishnaswamy, S.

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