Modelowanie właściwości system MEMS na przykładzie siłownika piezoelektrycznego

Translated title of the contribution: Performance evaluation modeling a Microelectromechanical system based Finite Element piezoelectric shear actuated beam

Mahidur R. Sarker, Azah Mohamed, Ramizi Mohamed

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

This paper presents the modeling a Microelectromechanical systems (MEMS) based Piezoelectric shear actuated beam by using COMSOL Multiphysics software of version 4.3a. The overall dimensions model of the beam is of 0.1-m long, 0.03-m width and 0.018-m thickness. For this model the structural mechanics boundary conditions are of the cantilever beam is fixed at its surfaces at x = 0 and that all other surfaces are free. In this model applied, the different materials (i.e., Silicon, Titanium, Barium titanate, Lead zirconate titanate, Material) with voltages between the top and bottom surfaces of the piezoceramic domain (i.e., 15V, 35V) have been analyzed. Firstly, select the Structural Mechanics of the Piezoelectric Devices and analyzed changing the selecting physics. Secondly, defining the Geometry on deflection of sandwiched beam is setting the boundary condition and analyzed changing of the beam. Thirdly, the beam is composed of a 0.001-m thick flexible foam core sandwiched by two 0.002-m thick silicon and titanium layers. In the Fourth step, bend of beam is analyzed by changing both materials of sandwiched beam and mashing of the defection beam is display by changing both thickness and electric potential. Finally, the results of analysis allowed to conclude us to design a piezoelectric shear actuated beam with different ranges and resolutions, under the condition of changing both thickness and material of electrodes gives the optimum deflection of 0.0308-um and 0.0815-um under 15V input voltage with different materials.

Original languageUndefined/Unknown
Pages (from-to)5-8
Number of pages4
JournalPrzeglad Elektrotechniczny
Volume91
Issue number3
DOIs
Publication statusPublished - 1 Jan 2015

Fingerprint

MEMS
Mechanics
Electric potential
Titanium
Boundary conditions
Piezoelectric devices
Silicon
Barium titanate
Cantilever beams
Foams
Physics
Lead
Electrodes
Geometry

Keywords

  • Cantilever
  • Materials
  • MEMS
  • Micro-devices

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

Cite this

Modelowanie właściwości system MEMS na przykładzie siłownika piezoelektrycznego. / Sarker, Mahidur R.; Mohamed, Azah; Mohamed, Ramizi.

In: Przeglad Elektrotechniczny, Vol. 91, No. 3, 01.01.2015, p. 5-8.

Research output: Contribution to journalArticle

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