PECVD growth of high quality graphene on interdigital electrodes of MEMS supercapacitor

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the field of science, there is a significant interest in graphene due to its extraordinary properties such as high electrical conductivity, good electrochemical stability and excellent mechanical behavior. This paper presents the direct graphene growth on interdigital electrodes by plasma enhanced chemical vapor deposition (PECVD) using Ni catalyst and methane (CH4) as the carbon source. The 100 nm of Ni was deposited on the top of SiO2 substrate functional as catalyst and electrode of MEMS supercapacitor. The growth of graphene was investigated at temperature 1000°C at 10 minutes and at fix power of 40 Watt. The morphology and structure of as- grown graphene were characterized by Raman spectroscopy, Field Emission Scanning Electron Microscope (FESEM) and Atomic Force Microscopy (AFM). From Raman spectra, it is observed that the intensity ratio of the 2D band to G band produced a good quality bilayer graphene.

Original languageEnglish
Title of host publicationLow-Dimensional Materials and Devices 2017
PublisherSPIE
Volume10349
ISBN (Electronic)9781510611559
DOIs
Publication statusPublished - 1 Jan 2017
EventLow-Dimensional Materials and Devices 2017 - San Diego, United States
Duration: 9 Aug 201710 Aug 2017

Other

OtherLow-Dimensional Materials and Devices 2017
CountryUnited States
CitySan Diego
Period9/8/1710/8/17

Fingerprint

Graphite
Chemical Vapor Deposition
Graphene
electrochemical capacitors
Plasma enhanced chemical vapor deposition
Micro-electro-mechanical Systems
microelectromechanical systems
MEMS
Electrode
graphene
Plasma
vapor deposition
Electrodes
electrodes
Catalyst
catalysts
Field Emission
Raman Spectra
Catalysts
Raman Spectroscopy

Keywords

  • Bilayer graphene
  • Graphene growth
  • Interdigital electrodes
  • MEMS supercapacitor
  • PECVD

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Cite this

PECVD growth of high quality graphene on interdigital electrodes of MEMS supercapacitor. / Abidin, Hafzaliza Erny Zainal; Hamzah, Azrul Azlan; Mohamed, Mohd Ambri; Yeop Majlis, Burhanuddin.

Low-Dimensional Materials and Devices 2017. Vol. 10349 SPIE, 2017. 1034919.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abidin, HEZ, Hamzah, AA, Mohamed, MA & Yeop Majlis, B 2017, PECVD growth of high quality graphene on interdigital electrodes of MEMS supercapacitor. in Low-Dimensional Materials and Devices 2017. vol. 10349, 1034919, SPIE, Low-Dimensional Materials and Devices 2017, San Diego, United States, 9/8/17. https://doi.org/10.1117/12.2273729
@inproceedings{2a3a7489d941421c80b8ad933bc34357,
title = "PECVD growth of high quality graphene on interdigital electrodes of MEMS supercapacitor",
abstract = "In the field of science, there is a significant interest in graphene due to its extraordinary properties such as high electrical conductivity, good electrochemical stability and excellent mechanical behavior. This paper presents the direct graphene growth on interdigital electrodes by plasma enhanced chemical vapor deposition (PECVD) using Ni catalyst and methane (CH4) as the carbon source. The 100 nm of Ni was deposited on the top of SiO2 substrate functional as catalyst and electrode of MEMS supercapacitor. The growth of graphene was investigated at temperature 1000°C at 10 minutes and at fix power of 40 Watt. The morphology and structure of as- grown graphene were characterized by Raman spectroscopy, Field Emission Scanning Electron Microscope (FESEM) and Atomic Force Microscopy (AFM). From Raman spectra, it is observed that the intensity ratio of the 2D band to G band produced a good quality bilayer graphene.",
keywords = "Bilayer graphene, Graphene growth, Interdigital electrodes, MEMS supercapacitor, PECVD",
author = "Abidin, {Hafzaliza Erny Zainal} and Hamzah, {Azrul Azlan} and Mohamed, {Mohd Ambri} and {Yeop Majlis}, Burhanuddin",
year = "2017",
month = "1",
day = "1",
doi = "10.1117/12.2273729",
language = "English",
volume = "10349",
booktitle = "Low-Dimensional Materials and Devices 2017",
publisher = "SPIE",

}

TY - GEN

T1 - PECVD growth of high quality graphene on interdigital electrodes of MEMS supercapacitor

AU - Abidin, Hafzaliza Erny Zainal

AU - Hamzah, Azrul Azlan

AU - Mohamed, Mohd Ambri

AU - Yeop Majlis, Burhanuddin

PY - 2017/1/1

Y1 - 2017/1/1

N2 - In the field of science, there is a significant interest in graphene due to its extraordinary properties such as high electrical conductivity, good electrochemical stability and excellent mechanical behavior. This paper presents the direct graphene growth on interdigital electrodes by plasma enhanced chemical vapor deposition (PECVD) using Ni catalyst and methane (CH4) as the carbon source. The 100 nm of Ni was deposited on the top of SiO2 substrate functional as catalyst and electrode of MEMS supercapacitor. The growth of graphene was investigated at temperature 1000°C at 10 minutes and at fix power of 40 Watt. The morphology and structure of as- grown graphene were characterized by Raman spectroscopy, Field Emission Scanning Electron Microscope (FESEM) and Atomic Force Microscopy (AFM). From Raman spectra, it is observed that the intensity ratio of the 2D band to G band produced a good quality bilayer graphene.

AB - In the field of science, there is a significant interest in graphene due to its extraordinary properties such as high electrical conductivity, good electrochemical stability and excellent mechanical behavior. This paper presents the direct graphene growth on interdigital electrodes by plasma enhanced chemical vapor deposition (PECVD) using Ni catalyst and methane (CH4) as the carbon source. The 100 nm of Ni was deposited on the top of SiO2 substrate functional as catalyst and electrode of MEMS supercapacitor. The growth of graphene was investigated at temperature 1000°C at 10 minutes and at fix power of 40 Watt. The morphology and structure of as- grown graphene were characterized by Raman spectroscopy, Field Emission Scanning Electron Microscope (FESEM) and Atomic Force Microscopy (AFM). From Raman spectra, it is observed that the intensity ratio of the 2D band to G band produced a good quality bilayer graphene.

KW - Bilayer graphene

KW - Graphene growth

KW - Interdigital electrodes

KW - MEMS supercapacitor

KW - PECVD

UR - http://www.scopus.com/inward/record.url?scp=85033685971&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85033685971&partnerID=8YFLogxK

U2 - 10.1117/12.2273729

DO - 10.1117/12.2273729

M3 - Conference contribution

VL - 10349

BT - Low-Dimensional Materials and Devices 2017

PB - SPIE

ER -