Oxide passivated low reflection nano-structured solar cell

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The main processes in conventional silicon solar cell manufacturing are surface cleaning, saw damage removal, and texturing. These steps require excessive water and chemical usage. In addition 10 % of the wafers are wasted through etching. These steps are followed by surface passivation and reflection reduction through expensive and inflammable, toxic-gas based plasma enhanced chemical vapor deposition process for deposition of high index anti-reflection SiN films. Surface reflection measurements from these surfaces have been carried out was comparable or 1% lower than SiN-coated surfaces and eliminating the need for deposition of high index SiN films. Si nanostructure passivation has been achieved with an oxide film grown as part of the POCl3 emitter process. These innovations have significantly reduced water and chemical usage, and have also eliminated expensive, silane-based plasma processing without restructuring the existing industrial manufacturing process.

Original languageEnglish
Title of host publicationConference Record of the IEEE Photovoltaic Specialists Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1260-1264
Number of pages5
ISBN (Print)9781479932993
DOIs
Publication statusPublished - 2013
Event39th IEEE Photovoltaic Specialists Conference, PVSC 2013 - Tampa, FL
Duration: 16 Jun 201321 Jun 2013

Other

Other39th IEEE Photovoltaic Specialists Conference, PVSC 2013
CityTampa, FL
Period16/6/1321/6/13

Fingerprint

Solar cells
Oxides
Passivation
Surface cleaning
Plasma applications
Texturing
Silicon solar cells
Plasma enhanced chemical vapor deposition
Silanes
Oxide films
Water
Etching
Nanostructures
Innovation
Gases

Keywords

  • In-situ oxide passivation
  • Monofacial solar cells
  • Silicon

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering

Cite this

Leong, C. S., Sopian, K., & Zaidi, S. H. (2013). Oxide passivated low reflection nano-structured solar cell. In Conference Record of the IEEE Photovoltaic Specialists Conference (pp. 1260-1264). [6744370] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC.2013.6744370

Oxide passivated low reflection nano-structured solar cell. / Leong, Cheow Siu; Sopian, Kamaruzzaman; Zaidi, Saleem H.

Conference Record of the IEEE Photovoltaic Specialists Conference. Institute of Electrical and Electronics Engineers Inc., 2013. p. 1260-1264 6744370.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Leong, CS, Sopian, K & Zaidi, SH 2013, Oxide passivated low reflection nano-structured solar cell. in Conference Record of the IEEE Photovoltaic Specialists Conference., 6744370, Institute of Electrical and Electronics Engineers Inc., pp. 1260-1264, 39th IEEE Photovoltaic Specialists Conference, PVSC 2013, Tampa, FL, 16/6/13. https://doi.org/10.1109/PVSC.2013.6744370
Leong CS, Sopian K, Zaidi SH. Oxide passivated low reflection nano-structured solar cell. In Conference Record of the IEEE Photovoltaic Specialists Conference. Institute of Electrical and Electronics Engineers Inc. 2013. p. 1260-1264. 6744370 https://doi.org/10.1109/PVSC.2013.6744370
Leong, Cheow Siu ; Sopian, Kamaruzzaman ; Zaidi, Saleem H. / Oxide passivated low reflection nano-structured solar cell. Conference Record of the IEEE Photovoltaic Specialists Conference. Institute of Electrical and Electronics Engineers Inc., 2013. pp. 1260-1264
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