Optimization of on-chip interface circuit for MEMS sensor based on micro-cantilever

Badariah Bais, Liang Wen Loh, Rosminazuin Ab Rahim, Burhanuddin Yeop Majli

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Micro-cantilever has been proven as an outstanding platform for extremely sensitive chemical and biological sensors. MEMS cantilever-based sensor is becoming popular due to its high sensitivity, high selectivity, easy to fabricate and can be easily integrated with on-chip electronics circuitry. However, the interface circuit used in this kind of sensors typically has a very low resolution and this limits its capability in sensing the small signal generated by the micro-cantilever. One solution is by incorporating stress concentration regions (SCR) on the micro-cantilever which were found to improve the sensitivity of the sensor. This project will focus on optimizing the sensitivity of the micro-cantilever by modeling the micro-cantilever with the SCR technique. The model is then be verified by numerical simulations.

Original languageEnglish
Title of host publicationAdvanced Materials Research
Pages13-16
Number of pages4
Volume254
DOIs
Publication statusPublished - 2011
EventInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS - Suntec
Duration: 26 Jun 20111 Jul 2011

Publication series

NameAdvanced Materials Research
Volume254
ISSN (Print)10226680

Other

OtherInternational Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS
CitySuntec
Period26/6/111/7/11

Fingerprint

MEMS
Networks (circuits)
Sensors
Stress concentration
Electronic equipment
Computer simulation

Keywords

  • Biosensor
  • Cantilever
  • MEMS
  • Piezoresistor
  • Stress concentration regions

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Bais, B., Loh, L. W., Rahim, R. A., & Majli, B. Y. (2011). Optimization of on-chip interface circuit for MEMS sensor based on micro-cantilever. In Advanced Materials Research (Vol. 254, pp. 13-16). (Advanced Materials Research; Vol. 254). https://doi.org/10.4028/www.scientific.net/AMR.254.13

Optimization of on-chip interface circuit for MEMS sensor based on micro-cantilever. / Bais, Badariah; Loh, Liang Wen; Rahim, Rosminazuin Ab; Majli, Burhanuddin Yeop.

Advanced Materials Research. Vol. 254 2011. p. 13-16 (Advanced Materials Research; Vol. 254).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Bais, B, Loh, LW, Rahim, RA & Majli, BY 2011, Optimization of on-chip interface circuit for MEMS sensor based on micro-cantilever. in Advanced Materials Research. vol. 254, Advanced Materials Research, vol. 254, pp. 13-16, International Conference on Materials for Advanced Technologies, ICMAT2011 - Symposium G: NEMS/MEMS and MicroTAS, Suntec, 26/6/11. https://doi.org/10.4028/www.scientific.net/AMR.254.13
Bais B, Loh LW, Rahim RA, Majli BY. Optimization of on-chip interface circuit for MEMS sensor based on micro-cantilever. In Advanced Materials Research. Vol. 254. 2011. p. 13-16. (Advanced Materials Research). https://doi.org/10.4028/www.scientific.net/AMR.254.13
Bais, Badariah ; Loh, Liang Wen ; Rahim, Rosminazuin Ab ; Majli, Burhanuddin Yeop. / Optimization of on-chip interface circuit for MEMS sensor based on micro-cantilever. Advanced Materials Research. Vol. 254 2011. pp. 13-16 (Advanced Materials Research).
@inproceedings{d6790889d64c46e1926d77d17d1c4016,
title = "Optimization of on-chip interface circuit for MEMS sensor based on micro-cantilever",
abstract = "Micro-cantilever has been proven as an outstanding platform for extremely sensitive chemical and biological sensors. MEMS cantilever-based sensor is becoming popular due to its high sensitivity, high selectivity, easy to fabricate and can be easily integrated with on-chip electronics circuitry. However, the interface circuit used in this kind of sensors typically has a very low resolution and this limits its capability in sensing the small signal generated by the micro-cantilever. One solution is by incorporating stress concentration regions (SCR) on the micro-cantilever which were found to improve the sensitivity of the sensor. This project will focus on optimizing the sensitivity of the micro-cantilever by modeling the micro-cantilever with the SCR technique. The model is then be verified by numerical simulations.",
keywords = "Biosensor, Cantilever, MEMS, Piezoresistor, Stress concentration regions",
author = "Badariah Bais and Loh, {Liang Wen} and Rahim, {Rosminazuin Ab} and Majli, {Burhanuddin Yeop}",
year = "2011",
doi = "10.4028/www.scientific.net/AMR.254.13",
language = "English",
isbn = "9783037851456",
volume = "254",
series = "Advanced Materials Research",
pages = "13--16",
booktitle = "Advanced Materials Research",

}

TY - GEN

T1 - Optimization of on-chip interface circuit for MEMS sensor based on micro-cantilever

AU - Bais, Badariah

AU - Loh, Liang Wen

AU - Rahim, Rosminazuin Ab

AU - Majli, Burhanuddin Yeop

PY - 2011

Y1 - 2011

N2 - Micro-cantilever has been proven as an outstanding platform for extremely sensitive chemical and biological sensors. MEMS cantilever-based sensor is becoming popular due to its high sensitivity, high selectivity, easy to fabricate and can be easily integrated with on-chip electronics circuitry. However, the interface circuit used in this kind of sensors typically has a very low resolution and this limits its capability in sensing the small signal generated by the micro-cantilever. One solution is by incorporating stress concentration regions (SCR) on the micro-cantilever which were found to improve the sensitivity of the sensor. This project will focus on optimizing the sensitivity of the micro-cantilever by modeling the micro-cantilever with the SCR technique. The model is then be verified by numerical simulations.

AB - Micro-cantilever has been proven as an outstanding platform for extremely sensitive chemical and biological sensors. MEMS cantilever-based sensor is becoming popular due to its high sensitivity, high selectivity, easy to fabricate and can be easily integrated with on-chip electronics circuitry. However, the interface circuit used in this kind of sensors typically has a very low resolution and this limits its capability in sensing the small signal generated by the micro-cantilever. One solution is by incorporating stress concentration regions (SCR) on the micro-cantilever which were found to improve the sensitivity of the sensor. This project will focus on optimizing the sensitivity of the micro-cantilever by modeling the micro-cantilever with the SCR technique. The model is then be verified by numerical simulations.

KW - Biosensor

KW - Cantilever

KW - MEMS

KW - Piezoresistor

KW - Stress concentration regions

UR - http://www.scopus.com/inward/record.url?scp=79960041413&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79960041413&partnerID=8YFLogxK

U2 - 10.4028/www.scientific.net/AMR.254.13

DO - 10.4028/www.scientific.net/AMR.254.13

M3 - Conference contribution

SN - 9783037851456

VL - 254

T3 - Advanced Materials Research

SP - 13

EP - 16

BT - Advanced Materials Research

ER -