Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this study, a 2D axisymmetric finite element model of annular surface acoustic wave (A-SAW) resonator to evaluate the SAW propagation was modeled and its focusing properties on lithium niobate substrate was optimized. The analysis concept is based on utilization of patterned annular interdigital electrodes on piezoelectric substrate's surface to generate surface acoustic waves with high intensity in a confined localized area. From the simulation results, it can be observed that acoustic amplitude field, displacement contours and waves propagation direction are significantly influenced by the geometric parameters of the device. Increasing number of finger pairs of annular electrodes produces high displacement amplitude meanwhile devices with smaller electrodes' gap of 25 μm induced steeper focusing gradient compared to devices with 50 μm electrodes' gap. Acoustic waves from device with large inner diameter of 500 μm require more time to be focused at the center of the device. From the analysis, it can be concluded that small diffraction limited acoustic spot at the center of A-SAW device is suitable for microfluidics application that requires detection or manipulation of localized variations.

Original languageEnglish
Title of host publicationSymposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Print)9781479986255
DOIs
Publication statusPublished - 16 Jul 2015
Event17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 - Montpellier, France
Duration: 27 Apr 201530 Apr 2015

Other

Other17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015
CountryFrance
CityMontpellier
Period27/4/1530/4/15

Fingerprint

Microfluidics
Electrodes
optimization
propagation
acoustics
Acoustic waves
electrodes
Surface waves
Acoustics
Acoustic surface wave devices
Substrates
surface acoustic wave devices
Wave propagation
Resonators
lithium niobates
Lithium
Diffraction
manipulators
wave propagation
resonators

Keywords

  • annular interdigital electrodes
  • Microfluidics
  • surface acoustic wave

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Electrical and Electronic Engineering

Cite this

Abd Aziz, N., Bais, B., Buyong, M. R., Yeop Majlis, B., & Nordin, A. N. (2015). Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015 [7161011] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/DTIP.2015.7161011

Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications. / Abd Aziz, Norazreen; Bais, Badariah; Buyong, Muhamad Ramdzan; Yeop Majlis, Burhanuddin; Nordin, Anis Nurashikin.

Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. Institute of Electrical and Electronics Engineers Inc., 2015. 7161011.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abd Aziz, N, Bais, B, Buyong, MR, Yeop Majlis, B & Nordin, AN 2015, Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications. in Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015., 7161011, Institute of Electrical and Electronics Engineers Inc., 17th Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015, Montpellier, France, 27/4/15. https://doi.org/10.1109/DTIP.2015.7161011
Abd Aziz N, Bais B, Buyong MR, Yeop Majlis B, Nordin AN. Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications. In Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. Institute of Electrical and Electronics Engineers Inc. 2015. 7161011 https://doi.org/10.1109/DTIP.2015.7161011
Abd Aziz, Norazreen ; Bais, Badariah ; Buyong, Muhamad Ramdzan ; Yeop Majlis, Burhanuddin ; Nordin, Anis Nurashikin. / Optimization of focusing SAW propagation in piezoelectric medium for microfluidic applications. Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS, DTIP 2015. Institute of Electrical and Electronics Engineers Inc., 2015.
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